Control device, control system, robot, and robot system

ABSTRACT

A control device includes: a processor that is configured to execute computer-executable instructions so as to control a robot, wherein the processor is configured to: generate a second control signal by reducing at least one of frequency components obtained based on an output of a first detector which is installed in a portion vibrated by a robot and detects vibration from a first control signal for driving the robot, and wherein the portion is different from the robot and an end effector installed in the robot.

BACKGROUND 1. Technical Field

The present invention relates to a technology for reducing vibration ina robot.

2. Related Art

In the related art, in the fields of robot technologies, there aretechnologies for reducing vibration of work pieces held by endeffectors. In the technology of JP-A-2001-293638, a vibration frequencyat which a robot resonates in a state in which a work piece is held inadvance by an end effector is specified. Then, a band-elimination filteris applied to a torque control signal (which can be ascertained as atime function) which is provided to a current control unit controllingdriving of a servo motor of a robot to eliminate a component of thevibration frequency from the torque control signal. As a result, thetorque control signal which does not include the component of thevibration frequency is provided to the current control unit. A servomotor of which the driving is controlled by the current control unitbased on the torque control signal does not cause the work piece held bythe end effector to resonate at the vibration frequency.

In the technology of JP-A-2001-293638, when an eigenfrequency of therobot is obtained in a state in which a work piece is held by an endeffector, residual vibration is measured by adding an impact to the endeffector of the robot with a hammer. JP-A-2001-293638 discloses that aperiod of natural vibration is obtained when a time between crests(local maximum values) or troughs (local minimum values) of a pattern ofdisturbance torque of a motor driving a wrist axis is measured in a timesection in which the residual vibration occurs.

However, the technology of JP-A-2001-293638 is not applicable to a robotwhich may not measure disturbance torque of a motor driving a wrist axisin which the end effector is installed.

In control of the robot, a surrounding situation including the endeffector of the robot is imaged by a camera installed at a position awayfrom the robot and the robot is controlled based on the captured imagein some cases. In such cases, for example, a work piece to be moved ontoa conveyer belt is worked by the robot in some cases. After the endeffector of the robot reaches a position determined in advance withregard to the work piece and it is confirmed that the end effector stopsat the position, a work of the work piece by the robot starts.

In such a case, even when the end effector of the robot is moved to apredetermined position and then residual vibration of the end effectoris sufficiently converged, the following problem occurs in a case inwhich the camera is still vibrated due to an immediately previousoperation of the robot. That is, since the end effector is vibrated withrespect to a frame (framework) of an image in the image acquired by thecamera, a control unit of the robot does not determine that “a workstarts working the work piece”. For this reason, a cycle time of thework by the robot may be lengthened.

In the technology of JP-A-2001-293638, the resonation of the work pieceheld by the end effector can be reduced, but the foregoing problem maynot be resolved.

SUMMARY

An advantage of some aspects of the invention is to solve at least apart of the problems described above, and the invention can beimplemented as the following forms or application examples.

(1) According to an aspect of the present disclosure, a control deviceis provided. The control device includes: a control signal alternationunit that is able to generate a second control signal by reducing atleast one of frequency components obtained based on an output of a firstdetector which is installed in a portion vibrated by a robot and detectsvibration from a first control signal for driving the robot and is ableto output the second control signal. The portion is different from therobot and an end effector installed in the robot.

According to the aspect, when a portion different from the robot andvibrated by the robot has an influence on control of the robot, thefirst control signal is altered so that vibration of the portion can bereduced, and the second control signal is generated and output to therobot. As a result, it is possible to reduce an adverse influence of thevibration of the other portion different from the robot on the controlof the robot.

(2) In the control device according to the aspect, the portion may be aframe supporting the robot.

According to the aspect with this configuration, relative vibration issufficiently converged in a portion from to a proximal portion of therobot to the end effector. However, when the frame supporting the entirerobot is vibrated due to an operation of the robot, the second controlsignal of reducing the vibration can be output to the robot. As aresult, it is possible to reduce vibration of the robot supported by theframe.

(3) In the control device according to the aspect, the portion may be atleast one of an imaging unit capable of capturing an image and astructure in which the imaging unit is installed.

According to the aspect with this configuration, when the imaging unitis vibrated due to an operation of the robot, the second control signalof reducing the vibration can be output to the robot. As a result, it ispossible to reduce an adverse influence of the vibration of the imagingunit on control of the robot and/or an adverse influence on controlwhich is based on an image obtained by imaging the work piece.

(4) In the control device according to the aspect, the portion may beone or more locations among a location at which a work piece which is awork target of the robot is put by the robot, a location at which thework piece is put before the work piece is moved by the robot, and alocation at which the robot executes a work on the work piece.

According to the aspect with this configuration, it is possible toprevent a situation in which a standby time until start of an operationduring a work becomes longer since the location at which the work pieceis put by the robot, the location at which the work piece moved by therobot is put, or the location at which the robot executes the work onthe work piece is vibrated in the operation of the robot.

(5) In the control device according to the aspect, the control signalalternation unit may be able to output the second control signalobtained by further reducing at least one of frequency componentsdetermined based on an output of a second detector which is installed inthe robot and detects vibration from the first control signal.

According to the aspect with this configuration, the second controlsignal of causing vibration of the portion different from the robot andvibration of the robot to rarely occur can be output to the robot.

(6) In the control device according to the aspect, the control signalalternation unit may be able to generate a third control signal byreducing at least one of frequency components determined based on anoutput of a second detector which is installed in the robot and detectsvibration from the first control signal and is able to switch and outputthe second and third control signals.

According to the aspect with this configuration, the second controlsignal of causing vibration of the portion different from the robot torarely occur and the third control signal of causing vibration of therobot to rarely occur can be selectively output to the robot.

(7) In the control device according to the aspect, the second detectormay be installed in an arm included in the robot.

(8) According to another aspect of the present disclosure, a controlsystem including any of the control devices according to the aspects anda first detector is provided. The first detector includes an output unitthat is able to output information regarding detected vibration, and amounting unit that is installed to be replaced with respect to an outputunit and is installable in a portion.

According to the aspect, by preparing the mounting unit according to theportion in which the first detector is installed, it is possible toinstall the first detector in any of various portions.

(9) The control system according to the aspect may further include aplurality of the mounting units with different mounting schemes for theportion.

According to the aspect with this configuration, by selecting themounting unit according to the portion in which the first detector isinstalled among the plurality of mounting units with the differentmounting schemes, it is possible to easily install the first detector inany of various portions.

(10) In the control system according to the aspect, the first detectormay be able to detect acceleration of the first detector in threedirections perpendicular to each other and have a notation indicatingthe three directions on an outer surface.

According to the aspect with this configuration, when the first detectoris installed in the portion different from the robot, the first detectorcan be installed in conformity with a direction of problematicvibration. Therefore, it is possible to effectively detect theproblematic vibration and generate the second control signal of reducingthe vibration.

(11) According to still another aspect of the present disclosure, arobot controlled by any of the control devices according to the aspectsis provided.

(12) According to still another aspect of the present disclosure, arobot system including any of the control devices according to theaspects and a robot controlled by the control device is provided.

All the plurality of constituent elements according to each aspect ofthe above-described present disclosure are not essential. To resolvesome or all of the above-described problems or achieve some or all ofthe advantages described in the present specification, some of theplurality of constituent elements can appropriately be changed, deleted,or substituted with other new constituent elements and restrictedcontent can also be partially deleted. To resolve some or all of theabove-described problems or achieve some or all of the advantagesdescribed in the present specification, some or all of the technicalfeatures included in the aspects of the above-described presentdisclosure can be combined with some or all of the technical featuresincluded in other aspects of the above-described present disclosure andcan also be realized in independent aspects of the present disclosure.

BRIEF DESCRIPTION OF THE DRAWINGS

The invention will be described with reference to the accompanyingdrawings, wherein like numbers reference like elements.

FIG. 1 is a diagram illustrating a robot system according to anembodiment.

FIG. 2 is a block diagram illustrating a relation between constituentelements of a robot control device, and a robot, a camera, and atransport device.

FIG. 3 is a diagram illustrating an indication indicating a targetvibration frequency which is to be eliminated from a torque controlsignal set in a vibration reduction process according to the embodiment.

FIG. 4 is a graph illustrating a change in a torque control signal valuein two continuous operations.

FIG. 5 is a graph illustrating an example of a ratio [%] of a weightadded to a value of an earlier torque control signal when a filterprocessing unit generates a third torque control signal.

FIG. 6 is a table illustrating examples of values of an earlier torquecontrol signal, values of a later torque control signal, a third torquecontrol signal generated using the earlier and later torque controlsignals, and weights of the values of the earlier torque control signaland the values of the later torque control signal generated in the timesection illustrated in FIG. 5 by the filter processing unit.

FIG. 7 is a graph illustrating an example of a ratio [%] of a weightadded to a value of an earlier torque control signal when a filterprocessing unit generates a third torque control signal.

FIG. 8 is a table illustrating examples of values of an earlier torquecontrol signal, values of a later torque control signal, a third torquecontrol signal generated using the earlier and later torque controlsignals, and weights of the values of the earlier torque control signaland the values of the later torque control signal generated in the timesection illustrated in FIG. 7 by the filter processing unit.

FIG. 9 is a graph illustrating a position of a distal end of an arm ofthe robot in a certain direction.

FIG. 10 is a diagram illustrating a robot referred to when automaticON/OFF of setting of a vibration reduction process is described.

FIG. 11 is a table illustrating examples of conditions in which thevibration reduction process is not executed and timings at which thevibration reduction process is valid after the vibration reductionprocess is invalid under each condition when an instruction to executethe vibration reduction process is received by a control signalgeneration unit from a user.

FIG. 12 is a diagram illustrating an example of a program list operatingthe robot.

FIG. 13 is a diagram illustrating an indication of a display when acomputer system including the display is connected to a robot controldevice.

FIG. 14 is a flowchart illustrating a flow of management of the robotsystem according to the embodiment.

FIG. 15 is a diagram illustrating a configuration of a system when thevibration reduction process is set.

FIG. 16 is a perspective view illustrating a vibration measurementdevice adopted according to the embodiment.

FIG. 17 is a perspective view illustrating the vibration measurementdevice.

FIG. 18 is a perspective view illustrating the vibration measurementdevice including a first mounting unit.

FIG. 19 is a perspective view illustrating the vibration measurementdevice including second mounting units.

FIG. 20 is a perspective view illustrating the vibration measurementdevice including third mounting units.

FIG. 21 is a perspective view illustrating the vibration measurementdevice including a fourth mounting unit.

FIG. 22 is a flowchart illustrating a setting procedure of the vibrationreduction function.

FIG. 23 is a graph illustrating an example of a specific operationinstructed from a certain servo motor of the robot.

FIG. 24 is a diagram illustrating a result obtained by executing fastFourier transform on a speed waveform of a specific operation.

FIG. 25 is a graph illustrating an example of a specific operationinstructed from a certain servo motor of the robot.

FIG. 26 is a diagram illustrating a result obtained by executing fastFourier transform on a speed waveform of the specific operation.

FIG. 27 is a diagram illustrating an output displayed on a display in astep.

FIG. 28 is a diagram illustrating an angular velocity graph.

FIG. 29 is a diagram illustrating an acceleration graph.

FIG. 30 is a diagram illustrating a processing target graph.

FIG. 31 is a diagram illustrating an expanded graph.

FIG. 32 is a diagram illustrating a frequency graph.

FIG. 33 is a diagram illustrating another example of the frequencygraph.

FIG. 34 is a diagram illustrating still another example of the frequencygraph.

FIG. 35 is a diagram illustrating still another example of the frequencygraph.

FIG. 36 is a diagram illustrating still another example of the frequencygraph.

FIG. 37A is a diagram illustrating another user interface for an inputfor designation of processing content and an output of a processingresult.

FIG. 37B is a diagram illustrating still another user interface for aninput for designation of processing content and an output of aprocessing result.

FIG. 38 is a flowchart illustrating another example of a settingprocedure of the vibration reduction function.

FIG. 39 is a graph equivalent to the expanded graph displayed in a stepof FIG. 38.

FIG. 40 is a graph equivalent to the frequency graph displayed in thestep of FIG. 38.

FIG. 41 is a graph equivalent to the expanded graph displayed in a stepof FIG. 38.

FIG. 42 is a graph equivalent to the frequency graph displayed in thestep of FIG. 38.

FIG. 43 is a graph equivalent to the expanded graph displayed in a stepof FIG. 38.

FIG. 44 is a graph equivalent to the frequency graph displayed in thestep of FIG. 38.

FIG. 45 is a diagram illustrating a graph and still another userinterface for an input for designation of processing content and anoutput of a processing result.

FIG. 46 is a diagram illustrating the graph and still another userinterface for an input for designation of processing content and anoutput of a processing result.

FIG. 47 is a diagram illustrating two robot systems disposed side byside.

DESCRIPTION OF EXEMPLARY EMBODIMENTS A. Configuration of Robot System

FIG. 1 is a diagram illustrating a robot system according to anembodiment. The robot system according to the embodiment includes arobot 100, an end effector 200, a robot control device 300, a camera400, and a transport device 500.

The robot 100 is a 6-axis robot including an arm 110 that has six rotaryjoints X11 to X16. The joints X11, X14, and X16 are torsion joints. Thejoints X12, X13, and X15 are flexural joints. The robot 100 can disposethe end effector 200 installed at a distal end of the arm 110 at anattitude designated at a position designated in a 3-dimensional space byrotating each of the six joints X11 to X16 using each servo motor. Aspot representing the position of the end effector 200 in the3-dimensional space is referred to as a tool center point (TCP).

The robot 100 includes a force sensor 190 at the distal end of the arm110. The end effector 200 is installed in the arm 110 of the robot 100via the force sensor 190. The force sensor 190 can measure forces intriaxial directions of the X, Y, and Z axes acted on the end effector200 and torque around the X, Y, and Z axes. An output of the forcesensor 190 is transmitted to the robot control device 300 to be used forcontrol of the robot 100.

The robot control device 300 is connected to the robot 100 and controlsan operation of the robot 100. More specifically, the robot controldevice 300 drives the servo motor moving the joints X11 to X16 of therobot 100.

The robot control device 300 is instructed to execute an operation ofdesignating the robot 100 by a robot instruction device 600. The robotinstruction device 600 is a so-called “teaching pendant”. When the robot100 is actually managed, the robot instruction device 600 first gives aninstruction to the robot before the management of the robot 100. Therobot control device 300 stores an instruction result as data. The robotcontrol device 300 controls the robot 100 based on data indicating thestored instruction result in a stage of the management of the robot 100.

The transport device 500 is a belt conveyer including rollers 510 and abelt 520. The transport device 500 moves the belt 520 in a directionindicated by an arrow At in FIG. 1 by driving the rollers 510. Thetransport device 500 loads a work piece W01 on the belt 520 andtransports the work piece W01 in the direction indicated by the arrowAt. The work piece W01 is a target which is worked by the robot 100.

The end effector 200 is installed at the distal end of the arm 110. Theend effector 200 is controlled by the robot control device 300 such thatthe end effector 200 can grasp the work piece W01 and can let go of thegrasped work piece W01. As a result, for example, the robot 100 and theend effector 200 are controlled by the robot control device 300 suchthat the robot 100 and the end effector 200 can grasp and move the workpiece W01 on the transport device 500.

The camera 400 can capture a photo image containing the work piece W01located at a predetermined position on the transport device 500 and theperiphery of the work piece W01. The image generated by the camera 400is transmitted to the robot control device 300 to be used for control ofthe robot 100. The camera 400 is supported by a post F400. The camera400 supported by the post F400 is shaken due to an operation of therobot 100 in some cases.

FIG. 2 is a block diagram illustrating a relation between constituentelements of the robot control device 300, and the servo motor 410 andthe position sensor 420 included in the robot 100, the camera 400, andthe transport device 500. The robot control device 300 includes acontrol signal generation unit 310, a position control unit 320, a speedcontrol unit 330, a filter processing unit 340, a torque control unit350, a servo amplifier 360, a filter setting unit 345, a target positionacquisition unit 370, a tracking correction amount acquisition unit 380,and a force control unit 390.

The control signal generation unit 310 generates a position controlsignal indicating a target position at which the end effector 200 is tobe located and outputs the position control signal to the positioncontrol unit 320. When an instruction to execute tracking control isreceived from a user, the control signal generation unit 310 outputs acontrol signal for executing the tracking control to the positioncontrol unit 320. When an instruction to execute force control isreceived from the user, the control signal generation unit 310 outputs acontrol signal for executing the force control to the position controlunit 320.

When an instruction to execute the force control is received from theuser, the control signal generation unit 310 generates a force controlsignal indicating a force and a direction of the force to be generatedby the end effector 200 and torque and a direction of the torque andoutputs the force control signal to the force control unit 390. Thecontrol signal generation unit 310 outputs a control signal indicatingwhether a vibration reduction process is executed in response to aninstruction input in advance from the user to the filter setting unit345. The control signal generation unit 310 outputs a command indicatingan operation which is executed by the robot 100 (for example, a commandfor executing CP control or a “Power Low” command) to the filter settingunit 345.

The target position acquisition unit 370 specifies a position of thework piece W01 transported by the transport device 500 based on thephoto image of the periphery of the work piece W01 received from thecamera 400 and outputs the position of the work piece W01.

The transport device 500 outputs a signal indicating rotationalpositions of the rollers 510. The belt 520 is driven by the rollers 510and the work piece W01 on the belt 520 is loaded. Therefore, based onthe rotational positions of the rollers 510, a current position of thework piece W01 transported on the belt 520 can be estimated.

The tracking correction amount acquisition unit 380 receives a signalindicating the rotational positions of the rollers 510 from thetransport device 500. The tracking correction amount acquisition unit380 receives the position of the work piece W01 from the target positionacquisition unit 370. The tracking correction amount acquisition unit380 determines the current position of the work piece W01 transported bythe transport device 500 based on such information. Then, the trackingcorrection amount acquisition unit 380 determines a tracking correctionamount suitable for the current position of the work piece W01 based onthe current position of the work piece W01 and outputs the trackingcorrection amount.

The force control unit 390 receives the force control signal indicatingthe force and the direction of the force to be generated by the endeffector 200 and the torque and the direction of the torque from thecontrol signal generation unit 310. The force control unit 390 receivesforces in the triaxial directions of the X, Y, and Z axes acted on theend effector 200 and torque around the X, Y, and Z axes from the forcesensor 190. Then, the force control unit 390 determines a positioncorrection amount based on these parameters and outputs the positioncorrection amount.

Each position sensor 420 is installed in the servo motor 410 drivingeach joint of the robot 100. The position sensor 420 detects arotational position and a rotational speed of the servo motor 410 andtransmits the rotational position and the rotational speed of the servomotor 410 to the robot control device 300.

The position control unit 320 receives the position control signal fromthe control signal generation unit 310. The position control unit 320receives the position correction amount from the force control unit 390.The position control unit 320 receives the rotational position of eachservo motor 410 as position feedback from the position sensor 420 of therobot 100. Further, the position control unit 320 receives the currentposition of the work piece W01 from the tracking correction amountacquisition unit 380. The position control unit 320 generates a speedcontrol signal of each servo motor 410 of the robot 100 based on theinformation and outputs the speed control signal.

When the instruction to execute the tracking control is not receivedfrom the control signal generation unit 310, the position control unit320 does not consider the information received from the trackingcorrection amount acquisition unit 380 at the time of generating thespeed control signal. When the instruction to execute the force controlis not received from the control signal generation unit 310, theposition control unit 320 does not consider the information receivedfrom the force control unit 390 at the time of generating the speedcontrol signal.

The speed control unit 330 receives the speed control signal from theposition control unit 320. The speed control unit 330 receives therotational speed of each servo motor 410 from the position sensor 420 ofthe robot 100 as a speed feedback. The speed control unit 330 generatesa torque control signal based on the speed control signal and therotational speed of each servo motor 410 and outputs the torque controlsignal.

The filter setting unit 345 receives a command indicating an operationwhich is being executed from the control signal generation unit 310. Thefilter setting unit 345 generates a control signal instructing one ormore frequencies which are to be eliminated from the torque controlsignal in response to the received command and outputs the controlsignal. The filter setting unit 345 can also output a control signalindicating that there is no frequency which is to be eliminated from thetorque control signal.

The filter processing unit 340 receives the torque control signal fromthe speed control unit 330. The filter processing unit 340 receives thecontrol signal for one or more frequencies which are to be eliminatedfrom the filter setting unit 345. The filter processing unit 340executes a process of eliminating one or more frequency componentsaccording to the control signal on the torque control signal output bythe speed control unit 330 to generate a new torque control signal andoutputs the new torque control signal. The filter processing unit 340executes this process using a band-elimination filter.

The frequency which is to be eliminated in the filter processing unit340 is a frequency determined in advance in response to a commandindicating an operation which is being executed. When the robot 100holds the work piece W01 (i) at an attitude of the robot 100 at an endtime point of the operation or (ii) at the end time point of theoperation, the frequency determined in advance in response to thecommand indicating the operation which is being executed is a vibrationfrequency of vibration of the robot 100 at the attitude of the robot 100at the end time point of the operation in a state in which the workpiece W01 is held. By performing such a process, it is possible toprevent a situation in which the robot 100 resonates at the vibrationfrequency at the end time point of the operation. Hereinafter, in thepresent specification, a process of reducing the resonance of a controltarget at the frequency by reducing a predetermined frequency componentof a control signal such as a torque control signal is referred to as a“vibration reduction process”. In addition, a function of reducingresonance of a control target at the frequency by reducing thepredetermined frequency component of the control signal is referred toas a “vibration reduction function”.

When the control signal indicating that there is no frequency which isto be eliminated is received from the filter setting unit 345, thefilter processing unit 340 outputs the torque control signal receivedfrom the speed control unit 330 without change. By executing theprocess, it is possible to drive the robot faithfully for the originalcontrol signal based on the torque control signal received from thespeed control unit 330.

The torque control unit 350 receives the torque control signal from thefilter processing unit 340. The feedback signal indicating a currentamount of a current supplied to each servo motor 410 is received fromthe servo amplifier 360. The torque control unit 350 determines thecurrent amount to be supplied to each servo motor 410 based on thetorque control signal and the current feedback signal of each servomotor 410 and drives each servo motor 410 via the servo amplifier 360.

B. Control of Robot System

(1) Switching of Vibration Reduction Process

FIG. 3 is a diagram illustrating an indication indicating a frequencywhich is to be eliminated from a torque control (in the presentspecification, referred to as a “target vibration frequency”) signal setin a vibration reduction function according to the embodiment. Theindication of FIG. 3 is displayed on a display 602 when the robotinstruction device 600 functioning as a setting device with a vibrationreduction function including the display 602 is connected to the robotcontrol device 300 and the vibration reduction function is set. A leftend column of a table is a number for discriminating setting. The usercan set a maximum of two target vibration frequencies for the vibrationreduction function corresponding to each number. The “target vibrationfrequency” may be an eigenfrequency of the system or may be a vibrationfrequency near the eigenfrequency of the system.

In the example of FIG. 3, in the column of number 1, F11 indicating onetarget vibration frequency is stored as a first parameter Param1. In thecolumn of number 2, F21 indicating one target vibration frequency isstored as the first parameter Param1. In the column of number 3, F31 andF32 indicating two target vibration frequencies are stored as parametersParam1 and Param2. That is, in setting of number 3, two frequencycomponents are eliminated from the original torque control signal (seereference numeral 340 in FIG. 2). Numerical values stored as Param1 andParam2 may be frequencies or may be any numerical values or signs foruniquely determining the frequencies.

In the embodiment, processing content of the vibration reductionfunction is switched in a plurality of operations included one work.That is, in the plurality of operations included in one work, thefrequency component which is to be eliminated from the torque controlsignal is converted. For example, after the frequency component of F11is eliminated according to the setting of number 1 in FIG. 3 in acertain operation, the frequency component of F21 is eliminatedaccording to setting of number 2 in FIG. 3 in a subsequent operation.

By executing such a process, it is possible to reduce resonance at theattitude at the end time point of each operation when the plurality ofoperations are included in one work. In the embodiment, the frequencycomponent which is to be eliminated is converted on all the motorsdriving the joints of the robot 100 at the same timing.

FIG. 4 is a graph illustrating a change in a torque control signal valuein two continuous operations. In FIG. 4, the horizontal axis representsa time and the vertical axis represents a value of the torque controlsignal. In the graph of FIG. 4, a dotted graph represents a value of thetorque control signal output by the speed control unit 330 (see FIG. 2).A solid graph represents a value of the torque control signal output bythe filter processing unit 340. The filter processing unit 340 switchesthe frequency which is to be eliminated from the torque control signalat time tsw from the frequency of F11 to the frequency of F21. As aresult, the value of the torque control signal output by the filterprocessing unit 340 is indicated by the solid line in FIG. 4.

Although not illustrated in FIG. 4, the filter processing unit 340outputs an intermediate torque control signal when the torque controlsignal from which the frequency of F11 is eliminated is switched to thetorque control signal from which the frequency of F21 is eliminated.

More specifically, when the torque control signal from which thefrequency of F11 is eliminated (hereinafter referred to as an “earliertorque control signal”) is switched to the torque control signal fromwhich the frequency of F21 is eliminated (hereinafter referred to as a“later torque control signal”), the filter processing unit 340calculates both a value of the earlier torque control signal and a valueof the later torque control signal in a predetermined time section.Then, a value of a third torque control signal is generated according toa weighted mean of values of the two torque control signals. The filterprocessing unit 340 can selectively output the earlier torque controlsignal, the later torque control signal, and the third torque controlsignal.

When the earlier torque control signal and the later torque controlsignal are switched, switching for reducing disorder of the torque andallophone can be executed by executing an output of the intermediatethird torque control signal between an output of the earlier torquecontrol signal and an output of the later torque control signal. Then,compared to an aspect in which vibration caused due to an operationaccording to the earlier torque control signal is converged withoutusing the third torque control signal and the later torque controlsignal is output, it is possible to shorten a time in which an operationaccording to the later torque control signal starts after an operationaccording to the earlier torque control signal.

In FIG. 4, the example in which two torque control signals from whichthe predetermined frequency components indicated by the parameters F11and F21 are eliminated are switched has been described. However, thesame advantage can be obtained by outputting the intermediate thirdtorque control signal even when the torque control signal from which thepredetermined frequency component is eliminated and the torque controlsignal from which the frequency component is not eliminated (the torquecontrol signal output by the speed control unit 330) are switched.

FIG. 5 is a graph illustrating an example of a ratio [%] of a weight(mixture ratio) added to the value of the earlier torque control signalwhen the filter processing unit 340 generates the third torque controlsignal. In FIG. 5, the horizontal axis represents a time. Here, a timesection illustrated in FIG. 5 corresponds to, for example, a very shorttime near the time tsw illustrated in FIG. 4.

FIG. 6 is a table illustrating examples of values of the earlier torquecontrol signal, values of the later torque control signal, values of thethird torque control signal generated using the earlier and later torquecontrol signals, and weights of the values of the earlier torque controlsignal and the values of the later torque control signal generated inthe time section illustrated in FIG. 5 by the filter processing unit340. The graph of FIG. 5 is a graph of the weight (mixture ratio) of theearlier torque control signal shown in the second column from the rightside of FIG. 6 in a time axis direction. The values of the earliertorque control signal and the values of the later torque control signalillustrated in FIG. 6 are examples and do not correspond to the graph ofFIG. 4.

The filter processing unit 340 outputs the plurality of third torquecontrol signals between first and second torque control signals. At thistime, as illustrated in the graph of FIG. 5 and the table of FIG. 6, thefilter processing unit 340 generates the plurality of third torquecontrol signals in the descending order of the weights of the values ofthe earlier torque control signal and outputs the third torque controlsignals. In the present specification, “output of X in a descendingorder of A” includes an aspect in which a plurality of X with the samevalue of A are continuously output. For example, in FIG. 5, the weightof the value of the earlier torque control signal is constant in a timesection 1 to 2 and time sections 12 to 13 (see FIGS. 5 and 6).

By executing such a process, the frequency component to be eliminated ischanged at the time of transition from a certain operation to asubsequent operation, the value of the torque control signal isconsiderably changed for an elapse time of 0, and thus a situation ofthe disorder of torque or occurrence of allophone can be prevented. Bygradually changing the weight and switching the value of the controlsignal, a subsequent operation can be started in a short time comparedto an aspect in which a change in the value of the control signal orvibration of the robot caused due to a previous operation is convertedto a predetermined value or less and a subsequent operation is thenexecuted.

FIG. 7 is a graph illustrating another example of a ratio [%] of aweight (mixture ratio) added to the value of the earlier torque controlsignal when the filter processing unit 340 generates the third torquecontrol signal. In FIG. 7, the horizontal axis represents a time. Here,a time section illustrated in FIG. 7 corresponds to the very short timenear the time tsw illustrated in FIG. 4.

FIG. 8 is a table illustrating examples of weights of values of theearlier torque control signal, values of the later torque controlsignal, values of the third torque control signal generated using theearlier and later torque control signals, and weights of the values ofthe earlier torque control signal and the values of the later torquecontrol signal generated in the time section illustrated in FIG. 7 bythe filter processing unit 340. The graph of FIG. 7 is a graph of theweight (mixture ratio) of the earlier torque control signal shown in thesecond column from the right side of FIG. 8 in a time axis direction.The values of the earlier torque control signal and the values of thelater torque control signal illustrated in FIG. 8 are examples and donot correspond to the graph of FIG. 4.

In the examples of FIGS. 5 and 6, the weight (the mixture ratio) addedto the value of the earlier torque control signal linearly decreasesduring the predetermined time section. In the example of FIG. 7,however, a change ratio of the weight (mixture ratio) added to the valueof the earlier torque control signal near the time of starting aconversion process from the earlier torque control signal to the latertorque control signal (see time sections 1 to 4 in FIG. 7) and near thetime of ending the conversion process from the earlier torque controlsignal to the later torque control signal (see time sections 10 to 13 inFIG. 7) is less than in the section (see time sections 5 to 9 in FIG. 7)between the time sections 1 to 4 and 10 to 13. In such an aspect, thetransition in which change in torque or occurrence of allophone issmaller can be realized compared to the examples of FIGS. 5 and 6.

The filter processing unit 340 executes the conversion process describedabove with reference to FIGS. 5 to 8 in the predetermined time sectionincluding the time tsw in FIG. 4. A timing at which the conversion ofthe frequency component to be eliminated by the filter processing unit340 starts is a timing at which both the following conditions 1 and 2are satisfied.

In the present specification, “outputting a control signal when acertain condition is satisfied” in a certain configuration is notlimited to a case in which “whether the certain condition is satisfied”is determined in the configuration and a predetermined control signal isoutput. That is, in a case in which a situation in which “a certaincondition is satisfied” objectively occurs, “a˜control signal is outputwhen the certain condition is satisfied in the configuration” issatisfied when a predetermined control signal is output in theconfiguration.

[Condition 1] A deviation between the position of the distal end of thearm 110 of the robot 100 in the case of conformation to an earlieroutput torque control signal (earlier torque control signal) and theposition of the distal end of the arm 110 of the robot 100 in the caseof conformation to a later output torque control signal (later torquecontrol signal) is less than a position threshold determined in advance.

[Condition 2] A deviation between a speed of the distal end of the arm110 of the robot 100 in the case of conformation to an earlier outputtorque control signal and a speed of the distal end of the arm 110 ofthe robot 100 in the case of conformation to a later output torquecontrol signal is less than a speed threshold determined in advance.

FIG. 9 is a graph illustrating the position of the distal end of the arm110 of the robot 100 in a certain direction. In FIG. 9, the horizontalaxis represents a time. A dotted graph is a graph that shows theposition of the distal end of the arm 110 of the robot 100 in a case inwhich a specific frequency component is not eliminated in the filterprocessing unit 340. A solid graph is a graph that shows the position ofthe distal end of the arm 110 of the robot 100 in a case in which thefrequency component F11 is eliminated, that is, the earlier torquecontrol signal is output, in the filter processing unit 340. A one-dotchain graph is a graph that shows the position of the distal end of thearm 110 of the robot 100 in a case in which the frequency component F21is eliminated, that is, the later torque control signal is output, inthe filter processing unit 340.

For example, the solid graph in the case in which the frequencycomponent F11 is eliminated and the one-dot chain graph in the case inwhich the frequency component F21 is eliminated intersect each other attimes ts1 and ts5. Therefore, at the intersections of the graphs, adeviation in the position of the distal end of the arm 110 in both thecases is 0 (see Condition 1). However, a slope of the solid graph in thecase in which the frequency component F11 is eliminated and a slope ofthe one-dot chain graph in the case in which the frequency component F21is eliminated are different in both the intersections. That is, there isa deviation in a speed of the distal end of the arm 110 between both thecases. The magnitude of the deviation in the speed is greater than aspeed threshold in the embodiment (see Condition 2). For this reason,the times ts1 and ts5 are timings unsuitable for the conversion of thefrequency.

For example, the solid graph in the case in which the frequencycomponent F11 is eliminated and the one-dot chain graph in the case inwhich the frequency component F21 is eliminated are almost parallel attimes ts2 and ts4. Therefore, the deviation in the speed at the distalend of the arm 110 between both the cases is close to 0 (see Condition2). However, the one-dot chain graph in the case in which the frequencycomponent F21 is eliminated and the solid graph in the case in which thefrequency component F11 is eliminated are apart. That is, there is thedeviation in the position of the distal end of the arm 110 between theboth cases. In addition, the magnitude of the deviation in the positionis greater than the position threshold in the embodiment (see Condition1). For this reason, the times ts2 and ts4 are timings unsuitable forthe conversion of the frequency either.

At a time ts3, on the other hand, the solid graph in the case in whichthe frequency component F11 is eliminated and the one-dot chain graph inthe case in which the frequency component F21 is eliminated interesteach other. Therefore, the deviation in the position of the distal endof the arm 110 in both the cases is 0 (see Condition 1). In addition,the slope of the solid graph in the case in which the frequencycomponent F11 is eliminated and the slope of the one-dot chain graph inthe case in which the frequency component F21 is eliminated are closelyparallel to each other. That is, the deviation in the speed of thedistal end of the arm 110 in both the cases is less than the speedthreshold in the embodiment (see Condition 2). For this reason, the timets3 is a timing suitable for the conversion of the frequency. The sameapplies to ts6.

By converting the frequency which is to be eliminated under suchconditions, it is possible to execute the conversion in which disorderof the torque or allophone is small, compared to an aspect in which theswitching is executed regardless of the conditions.

In the present specification, the filter processing unit 340 is alsoreferred to as a “reception unit”, a “second control signal generationunit”, a “third control signal generation unit”, and a “control signalswitching unit”. A torque control signal generated by the speed controlunit 330 is also referred to as a “first control signal”. A torquecontrol signal generated by executing the filter processing unit 340 byexecuting a process of eliminating one or more frequency components fromthe torque control signal received from the speed control unit 330 isalso referred to as a “second control signal”. A torque control signalgenerated from the earlier torque control signal and the later torquecontrol signal by the filter processing unit 340 is also referred to asa “third control signal”. The torque control unit 350 and the servoamplifier 360 are also referred to as a “driving signal generationunit”.

A torque control signal generated by the filter processing unit 340through the vibration reduction function of number 1 in FIG. 3 (see theleft side of FIG. 4) is also referred to as the “second control signalof a first type” in the present specification. A frequency componentindicated by F11 in FIG. 3 to be eliminated at that time is alsoreferred to as a “first frequency component”. A torque control signalgenerated by the filter processing unit 340 through the vibrationreduction function of number 2 in FIG. 3 (see the right side of FIG. 4)is also referred to as a “second type second control signal”. Afrequency component indicated by F21 in FIG. 3 to be eliminated at thattime is also referred to as a “second frequency component”.

(2) Automatic ON/OFF of Vibration Reduction Process

In the embodiment, the filter setting unit 345 (see FIG. 2) generatesand outputs (i) a control signal for giving an instruction for one ormore frequencies which is to be eliminated from a torque control signalor (ii) a control signal indicating that there is no frequency which isto be eliminated from a torque control signal in response to a commandreceived from the control signal generation unit 310. Hereinafter, acase in which the filter setting unit 345 generates a control signalindicating that there is no frequency which is to be eliminated from atorque control signal will be described in more detail.

FIG. 10 is a diagram illustrating a robot 100 b referred to whenautomatic ON/OFF of setting of the vibration reduction function isdescribed. The robot system mentioned herein does not include thetransport device 500. A hardware configuration of the robot 100 b isdifferent from the robot 100.

The robot 100 b is mounted on a frame F100 b. The frame F100 b includesa substantially rectangular top plate and a substantially rectangularsupport 560 b. The frame F100 b is supported by four supports bindingfour corners of the top plate and four corners of the support 560 b. Therobot 100 b is fixed to the top plate of the frame F100 b and extendsfrom the top plate downwards.

A camera 400 b is installed in one post F400 b of the four supports ofthe frame F100 b. A configuration and a function of the camera 400 b arethe same as the camera 400. The work piece W01 is loaded on the support560 b of the frame F100 b.

The robot 100 b is a 4-axis robot that includes an arm 110 b having fourjoints X21 to X24. The joints X21, X22, and X24 are torsion joints. Thejoint X23 is a translation joint. The robot 100 can dispose an endeffector 200 b installed at a distal end of an arm 110 b at an attitudedesignated at a position designated in a 3-dimensional space by drivingthe four joints X21 to X24 using each servo motor.

The robot 100 b includes a force sensor 190 b at the distal end of thearm 110 b. The function of the force sensor 190 b is the same as theforce sensor 190 of the robot 100 in FIG. 1.

The end effector 200 b is installed at the distal end of the arm 110 bof the robot 100 b. The end effector 200 b can be controlled by a robotcontrol device (not illustrated) to hold the work piece W01 and can letgo of the held work piece W01. As a result, for example, the robot 100 band the end effector 200 b can be controlled by the robot control deviceto lift and move the work piece W01 on the support 560 b and execute awork.

The robot control device controlling the robot 100 b does not receive asignal indicating rotational positions of the rollers 510 from thetransport device 500 (see reference numeral 500 in FIG. 2). Differencesfrom the robot control device controlling the robot 100 b are the sameas the robot control device 300 in FIG. 2. To facilitate the technicalunderstanding, the robot control device is omitted in FIG. 10.

FIG. 11 is a table illustrating examples of conditions in which thevibration reduction process is not executed and timings at which thevibration reduction function is valid after the vibration reductionfunction is invalid under each condition when an instruction to executethe vibration reduction process is received by the control signalgeneration unit 310 from a user. Hereinafter, conditions in which thevibration reduction process is not executed will be described.

(i) Executing “Motor On” Command

The servo motor of the robot 100 b is excited according to “Motor On”.In a state before “Motor On”, the user can manually move the arm 110 bof the robot 100 b freely. “Motor On” does not designate a rotationalposition of the servo motor. Therefore, when the arm 110 b of the robot100 b has already been moved by the user, the servo motor of the robot100 b maintains the attitude of the arm 110 b and is excited even whenthe attitude of the arm 110 b is different from a basic attitudeoriginally taken by the arm 110 b at the time of power ON. That is, whenthe “Motor On” command is executed, the control signal generation unit310 (see FIG. 2) outputs a position control signal indicating an actualattitude of the arm 110 b based on an output of the position sensor 420rather than the basic attitude which is taken at the time of power ON.

In this case, the position control signal is changed for an elapse timeof 0 from the basic attitude which is taken at the time of power ON,that is, the attitude assumed by the system, to the attitude manuallymoved by the user. At this time, when the filter processing unit 340(see FIG. 2) executes the vibration reduction process of eliminating apredetermined frequency, the torque control signal which has to be 0 ischanged from an original value of 0 (for example, see FIG. 4). As aresult, the arm 110 b which has to be stopped may be moved. For thisreason, when the “Motor On” command is executed, the vibration reductionprocess is not executed (see the left column and the first row of FIG.11).

(ii) Executing “Motor Off” Command

The servo motor of the robot 100 b is not excited according to “MotorOff”. After the “Motor Off” command is executed, the servo motor of therobot 100 b is not driven until the “Motor On” command is executed.Therefore, the vibration reduction process is not executed (see the leftcolumn and the second row of FIG. 11).

(iii) Executing “Power Low” Command

“Power Low” is a command for designating a first operation mode in whichan operation is executed so that torque of a motor driving the robotdoes not exceed a predetermined first threshold. In the first operationmode, the torque generated by the servo motor is small. Therefore,acceleration of the arm 110 b of the robot 100 b is small. Accordingly,when one operation ends and the arm 110 b is stopped, there is a lowpossibility of the robot also resonating. For this reason, when the“Power Low” command is executed, a request for executing the vibrationreduction process is not high.

Conversely, when the vibration reduction process is executed, the valueof the torque control signal is changed from the original value (forexample, see FIG. 4). As a result, acceleration applied to the arm 110 band the end effector 200 b of the robot is also deviated from theoriginal value. Then, the position feedback is controlled (see FIG. 2),but the end effector 200 b is located at a position subtly deviatingfrom a position designated by the original position control signal. Itis not preferable that the position deviation occurs during executing acommand in which the request for executing the vibration reductionprocess is not high. Accordingly, while the “Power Low” command isexecuted and the robot is operating in the first operation mode, thevibration reduction process is not executed (see the left column and thethird row of FIG. 11).

(iv) Executing “Power High” Command

“Power High” is a command for designating a second operation mode inwhich torque greater than the first threshold is permitted to begenerated. In the second operation mode, the torque generated by theservo motor is large. Therefore, acceleration of the arm 110 b of therobot is also large. Accordingly, when one operation ends, there is ahigh possibility that the robot which has to be stopped at an attitudeat the time of ending an operation resonates. Accordingly, when the“Power High” command is executed, a request for executing the vibrationreduction process is high. Accordingly, the vibration reduction functionwhich is not executed at the time of executing the “Motor On” commandand the “Motor Off” command and the time of executing “Power Low”command is executed again at the time of executing the “Power High”command (see the right column and the first row of FIG. 11). Byexecuting such a process, the robot can be driven without resonating inthe second operation mode in which acceleration of each unit of therobot is greater than in the first operation mode.

(v) Executing Tracking Control

When tracking control for causing the work piece W01 on the transportdevice 500 to track the end effector 200 (also referred to as a“tracking process”) is executed (see reference numerals 380 and 500 inFIGS. 1 and 2), it is preferable that the end effector 200 accuratelytracks the work piece W01 on the transport device 500. Accordingly, itis preferable that the vibration reduction function in which positiondeviation of the end effector 200 b from the position of the originalposition control signal can occur is not executed during conveyertracking. Accordingly, while the tracking control is executed, thevibration reduction process is not executed (see the left column and thefourth row of FIG. 11). Then, when the tracking control ends or the“Power High” command is executed, the vibration reduction process isexecuted (see the right column and the second row of FIG. 11). Byexecuting such a process, it is possible to generate a driving signalfor operating the robot while accurately tracking a moving target whilethe tracking control is executed.

(vi) Executing Force Control

When control is executing using force feedback (see reference numerals190 and 390 in FIG. 2), the end effector 200 b is preferably disposed atan accurate position according to the original position control signal.The position deviation of the end effector 200 b occurs because a forceor torque to be generated by the end effector 200 b decreases orincreases from the original value. Accordingly, while the force controlis executing, the vibration reduction process is not executed (see theleft column and the fifth row of FIG. 11). Then, when the force controlends or the “Power High” command is executed, the vibration reductionprocess is executed (see the right column and the second row of FIG.11). By executing such a process, it is possible to generate a drivingsignal to operate the robot while accurately considering an externalforce or a reaction force added to the robot during executing the forcecontrol.

(vii) Executing Jog Operation

A jog operation is an operation of operating the servo motor of therobot without designating a movement distance. The jog operation isexecuted when the robot is instructed to execute an operation. The jogoperation is executed at a relatively slow speed. Therefore, when thejog operation is being executed or the jog operation ends and the arm110 b is stopped, there is a low possibility of the robot resonating.Accordingly, when the jog operation is executed, a request for executingthe vibration reduction process is not high. On the other hand, when thevibration reduction process is executed, as described above, there is apossibility that the end effector 200 b is located at a subtly deviatedposition from a position designated by the original position controlsignal. Accordingly, while the jog operation is being executed, thevibration reduction process is not executed (see the left column and thesixth row of FIG. 11). Then, when the jog operation ends or the “PowerHigh” command is executed, the vibration reduction process is executed(see the right column and the second row of FIG. 11).

(viii) Executing CP Control

Continuous path control is control in which the robot is operated alonga movement path determined in advance. The continuous path control isalso referred to as continuous path control (CP control). During thecontinuous path control, the end effector 200 b is preferably disposedat the accurate position according to the original position controlsignal at each time. Accordingly, during executing the continuous pathcontrol, the vibration reduction process is not executed (see the leftcolumn and the seventh row of FIG. 11). Then, when the continuous pathcontrol ends or the “Power High” command is executed, the vibrationreduction process is executed (see the right column and the second rowof FIG. 11).

By executing such a process, it is possible to generate a driving signalto operate the robot accurately along the movement path determined inadvance while the continuous path control is executed. When aninstruction to execute frequency component reduction is input to thecontrol signal generation unit 310, the robot can be driven so that therobot does not resonate at a predetermined frequency under anothercontrol.

FIG. 12 is a diagram illustrating an example of a program list operatingthe robot 100 b. The automatic ON/OFF of the vibration reductionfunction and execution of the vibration reduction function will bedescribed in the example of FIG. 12. In FIG. 12, commands to bementioned below are underlined.

By executing the “Motor On” command, the vibration reduction function isnot executed. Hereinafter, non-execution of the vibration reductionprocess is referred to as “turning Off the vibration reductionfunction”. Thereafter, by executing the “Power High” command, thevibration reduction process is executed. Hereinafter, execution of thevibration reduction process is also referred to as “turning On thevibration reduction function”.

“ABCSet 1, 30” is a command for setting a frequency of the vibrationreduction function of number 1 to a predetermined frequency indicated byparameter “30” (see FIG. 3).

“ABCSet 2, 15, 30” is a command for setting a frequency of the vibrationreduction function of number 2 to a predetermined frequency indicated byparameter “15” and the predetermined frequency indicated by parameter“30” (see FIG. 3).

“ABC 1” is a command indicating that the vibration reduction process ofnumber 1 is executed (see FIG. 3).

“ABC 2” is a command indicating that the vibration reduction process ofnumber 2 is executed (see FIG. 3).

When an instruction to execute reducing a frequency component is inputfrom the filter setting unit 345 and a predetermined subordinatecondition regarding a command or the like to be executed is satisfied byexecuting such a process, the filter processing unit 340 executes thevibration reduction process. As a result, the robot 100 b can be drivenso that the robot 100 b does not resonate at the predeterminedfrequency. When the instruction to execute a reduction in a frequencycomponent is not input from the filter setting unit 345, that is, acontrol signal indicating there is no frequency to be reduced is input,the filter processing unit 340 can drive the robot 100 b faithfully forthe original control signal.

In the embodiment, a case in which it is not preferable to execute thereduction in the frequency component is set as the subordinate condition(see FIG. 11). Therefore, even when the instruction to execute thereduction in the frequency component is input to the control signalgeneration unit 310, the frequency component is not automaticallyreduced in a case in which it is not preferable to execute the reductionin the frequency component. Accordingly, it is not necessary for theuser to input the instruction to execute the reduction in the frequencycomponent and an instruction not to execute the reduction in thefrequency component in each scene. For this reason, a load of theinstruction on the user is reduced.

FIG. 13 is a diagram illustrating indication of a display 602 when therobot instruction device 600 including the display 602 is connected tothe robot control device. The indication of FIG. 13 is shown on a lowerstage of the display 602. For example, while the vibration reductionprocess is executed during a series of works illustrated in FIG. 12, anindication Dvr such as “vibration reduction” is displayed with darkcolor. Conversely, while the vibration reduction process is notexecuted, the indication Dvr such as “vibration reduction” is displayedwith lighter color than while the vibration reduction process isexecuted.

By executing such a process, the user can easily understand that thevibration reduction process is executed, a torque control signalindicating that there is a low possibility of the robot resonating isgenerated, and the robot is driven while the robot is operating (seeFIGS. 12 and 13). Functional units of the robot control device 300 andthe robot instruction device 600 executing such a process areillustrated as display control units 305 and 615 in FIG. 1. The displaycontrol unit 305 is realized by a CPU 303 of the robot control device300. The display control unit 615 is realized by a CPU 610 of the robotinstruction device 600.

In the present specification, the filter processing unit 340 is alsoreferred to as a “second control signal generation unit” and a “controlsignal switching unit” (see FIG. 2). The control signal generation unit310 is also referred to as a “reception unit”. The torque control unit350 and the servo amplifier 360 are also referred to as a “drivingsignal generation unit”.

The fact that the control signal generation unit 310 (see FIG. 2) doesnot receive an instruction to execute the vibration reduction processfrom the user functions as “non-input of the instruction to execute thereduction in the frequency component” included in a “first condition”.The fact that the control signal generation unit 310 (see FIG. 2)receives the instruction to execute the vibration reduction process fromthe user functions as “input of the instruction to execute the reductionin the frequency component” included in a “second condition”.

The display 602 of the robot instruction device 600 connected to therobot control device is also referred to as a “display unit”.

In the foregoing embodiment, the position control unit 320 receives aninstruction to execute the tracking control from the control signalgeneration unit 310 and generates the speed control signal consideringinformation received from the tracking correction amount acquisitionunit 380 (see FIG. 2). As a result, the speed control unit 330 generatesa torque control signal according to the speed control signal. Theexecution of such a process functions as “generation of the firstcontrol signal so that the tracking process of operating the robot whiletracking a moving target” under the “subordinate condition” of a “thirdcondition”.

The force sensors 190 and 190 b (see FIGS. 1, 2, and 10) are alsoreferred to as a “force detection unit”. The position control unit 320receives an instruction to execute force control from the control signalgeneration unit 310 and generates a speed control signal consideringinformation received from the force control unit 390 (see FIG. 2). As aresult, the fact that the speed control unit 330 generates the torquecontrol signal according to the speed control signal functions as“generation of the first control signal based on an output of the forcedetection unit installed in the robot” under the “subordinatecondition”.

In the foregoing embodiment, the control signal generation unit 310generates a position control signal indicating a target positionaccording to a command to execute CP control, the position control unit320 generates a speed control signal according to the position controlsignal, and the speed control unit 330 generates the torque controlsignal according to the speed control signal. The execution of such aprocess functions as “generation of the first control signal under thecontinuous path control in which the robot is operated along themovement path determined in advance” under the “subordinate condition.”

That fact that the speed control unit 330 generates the torque controlsignal in a state in which the “Power Low” command is executed functionsas “generation of the first control signal according to the secondoperation mode” included in a “second condition”.

C. Setting of Vibration Reduction Process

FIG. 14 is a flowchart illustrating a flow of management of the robotsystem according to the embodiment. In the management of the robotsystem according to the embodiment, first, a robot is installed in afactory or the like and the vibration reduction function is set in stepS100. For example, specific parameters are set in Param1 and Param2illustrated in FIG. 3. Thereafter, in step S200, the robot is managementin the factory or the like and is used to manufacture a product or thelike. The content described in the foregoing B. is control content ofthe robot in the management stage of the robot (S200 of FIG. 14).Hereinafter, setting of the vibration reduction function equivalent toS100 of FIG. 14 will be described.

(1) Installing Vibration Measurement Device

FIG. 15 is a diagram illustrating a configuration of a system when thevibration reduction function is set. The configurations and functions ofthe robot 100, the end effector 200, and the robot control device 300have been described with reference to FIGS. 1 and 2. A vibrationmeasurement device capable of measuring acceleration in directions ofthree axis perpendicular to each other is installed in the robot 100 andanother portion. In the example of FIG. 15, a vibration measurementdevice 700 mounted on the robot 100 is an inertial measurement unit(IMU). The robot instruction device 600 functioning as a setting devicewith the vibration reduction function is connected to the robot controldevice 300. Hereinafter, the robot instruction device 600 is alsoreferred to as a setting device 600.

The setting device 600 is a computer that includes the display 602 witha touch sensor that functions as an output device and an input deviceand a key 604 and a track point 606 that function as input devices. Thesetting device 600 is connected to the vibration measurement device 700and the robot control device 300. The setting device 600 can specify atarget vibration frequency of a target in which the vibrationmeasurement device 700 is installed based on an output from thevibration measurement device 700. The setting device 600 can store thetarget vibration frequency in the RAM 301 or the ROM 302 (see FIG. 2) ofthe robot control device 300. As a result, the filter setting unit 345of the robot control device 300 (see FIG. 2) outputs a control signal tothe filter processing unit 340 with reference to the target vibrationfrequency and the filter processing unit 340 generates a torque controlsignal from which a component of the target vibration frequency iseliminated based on the control signal from the filter setting unit 345.

FIG. 16 is a perspective view illustrating the vibration measurementdevice 700 adopted according to the embodiment. The vibrationmeasurement device 700 adopted according to the embodiment is aninertial measurement unit (IMU). The vibration measurement device 700includes a first support unit 710, a second support unit 720, connectionunits 730, a measurement unit 740, an output unit 750, and a mountingunit. In FIG. 16, the mounting unit is not illustrated.

The measurement unit 740 includes an acceleration sensor that canmeasure acceleration in the X, Y, and Z axis directions and a gyrosensor that can measure an angular velocity about the X, Y, and Z axisdirections in each rotation. The measurement unit 740 can outputacceleration in the X, Y, and Z axis directions of the measurement unit740 and an angular velocity measured about the X, Y, and Z axisdirections in each rotation. The measurement unit 740 is fixed to thefirst support unit 710 which is a plate-shaped member.

The X, Y, and Z axis directions which are perpendicular to each otherand are directions of acceleration and angular velocity which can bemeasurable by the measurement unit 740 are illustrated on the uppersurface of the measurement unit 740. By providing such notation 745, theuser can install the vibration measurement device 700 in the robot 100without error in a direction oriented in a process of the setting device600 when the user can install the vibration measurement device 700 inthe robot 100.

The output unit 750 includes an output terminal. The output unit 750 isconnected to the measurement unit 740 and can output a measurementresult of the measurement unit 740 as a signal from the output terminalto the outside. The output terminal is wire-connected to the settingdevice 600. The output unit 750 is also fixed to the first support unit710.

The first support unit 710 is a substantially rectangular plate-shapedmember. The first support unit 710 is connected to the plate-shapedsecond support unit 720 by a pair of connection units 730. The pair ofconnection units 730 is fixed to the first support unit 710 by screws(not illustrated) penetrating through screw holes 715. The pair ofconnection units 730 is fixed to the second support unit 720 by screws(not illustrated) penetrating through screw holes 716.

FIG. 17 is a perspective view illustrating the vibration measurementdevice 700. The X, Y, and Z axes illustrated in FIG. 17 correspond tothe X, Y, and Z axes illustrated in FIG. 16. The second support unit 720is a substantially rectangular plate-shaped member. The second supportunit 720 includes three connection holes 724, 722, and 724 at positionsbetween holes 714 and 716 to which the pair of connection units 730 areconnected. Female screws are formed in inner surfaces of the connectionholes 724, 722, and 724.

FIG. 18 is a perspective view illustrating the vibration measurementdevice 700 including a first mounting unit 760. The first mounting unit760 is a bar-shaped member in which male screws are formed at both ends.The first mounting unit 760 is screwed to be fixed to the middle hole722 (see FIGS. 16 and 17) of the second support unit 720. When a hole inwhich a female screw corresponding to a measurement target of the robot100 or the like is formed is formed, the vibration measurement device700 is installed in the measurement target by the first mounting unit760.

FIG. 19 is a perspective view illustrating the vibration measurementdevice 700 including second mounting units 770, 770. The second mountingunits 770 are cylindrical magnets. The second mounting units 770 arescrewed to be fixed to the holes 724, 724 of the second support unit 720(see FIGS. 16 and 17). When a portion of which vibration is desired tobe measured in the measurement target of the robot 100 or the like isformed of a magnetic substance, the vibration measurement device 700 isinstalled in the measurement target by the second mounting unit 770.

FIG. 20 is a perspective view illustrating the vibration measurementdevice 700 including third mounting units 780, 780. The third mountingunits 780, 780 are fixing tools that each include a pair of throughholes 782, 782 through which a clamping band passes. The third mountingunits 780, 780 are screwed to be fixed to holes 724, 724 of the secondsupport unit 720 (see FIGS. 16 and 17). The vibration measurement device700 is fixed to the measurement target by the clamping band by passingthe clamping band through the through holes 782, 782 included in each ofthe third mounting units 780, 780.

FIG. 21 is a perspective view illustrating the vibration measurementdevice 700 including a fourth mounting unit 790. The fourth mountingunit 790 is an adhesive layer configured with an adhesive member. Thefourth mounting unit 790 is fixed to the second support unit 720 byadhesive property of the adhesive member. The vibration measurementdevice 700 is installed in the measurement target by the adhesiveproperty of the fourth mounting unit 790.

The second support unit 720 can be selectively installed in one of thefirst mounting unit 760 to the fourth mounting unit 790. In such aconfiguration, the vibration measurement device 700 is installed in anyof various types of measurement targets. As a result, when the robot ora portion different from the end effector installed in the robot andvibrated by the robot has an influence on control of the robot, thevibration measurement device 700 can be installed in any portion. As aresult, it is possible to reduce an adverse influence on the control ofthe robot due to vibration of the portion different from the robot.

In the example of FIG. 15, the vibration measurement device 700 isinstalled at the distal end of the arm 110 of the robot 100. Thevibration measurement device 700 is installed at the distal end of thearm 110 of the robot 100 by selecting an appropriate mounting unit fromthe first mounting unit 760 to the fourth mounting unit 790 withmutually different mounting schemes.

As a result, the setting device 600 can determine the target vibrationfrequency based on information regarding vibration of the distal end ofthe arm 110 of the robot 100 obtained from the vibration measurementdevice 700 and can output a torque control signal in which the vibrationof the distal end of the arm 110 of the robot 100 rarely occurs to therobot control device 300 (see reference numeral 340 of FIG. 2). As aresult, even when a sensor capable of measuring acceleration or anangular velocity is not installed in a portion in which vibration isproblematic in the robot, it is possible to generate a torque controlsignal in which vibration of the robot rarely occurs.

For example, relative vibration can sufficiently be converged in aportion formed from a proximal portion of the robot to the end effectorof the robot after an operation of the robot 100 ends. However, when aframe supporting the entire robot is vibrated due to an operation of therobot, an appropriate mounting unit can be selected from the firstmounting unit 760 to the fourth mounting unit 790 and the vibrationmeasurement device 700 can be installed in the frame F100 b (see FIG.10) supporting the robot.

As a result, the setting device 600 can determine the target vibrationfrequency based on information regarding the vibration of the frame F100b obtained from the vibration measurement device 700 and can output atorque control signal in which the vibration of the frame F100 b rarelyoccurs to the robot control device 300 (see reference numeral 340 ofFIG. 2). As a result, it is possible to reduce the vibration of therobot supported by the frame.

For example, vibration of the robot is sufficiently converged after anoperation of the robot ends. However, when a camera capturing an imageof the robot is vibrated due to an operation of the robot, it isdetermined that the vibration of the robot is not sufficientlyconverged, and start of a subsequent operation is late, countermeasurescan be taken as follows. That is, an appropriate mounting unit can beselected from the first mounting unit 760 to the fourth mounting unit790 and the vibration measurement device 700 can be installed in thecamera 400 b (see FIG. 10) or the post F400 (see FIG. 1) supporting thecamera 400.

As a result, the setting device 600 can determine the target vibrationfrequency based on information regarding the vibration of the cameraobtained from the vibration measurement device 700 and can output atorque control signal in which the vibration of the camera rarely occursto the robot control device 300 (see reference numeral 340 of FIG. 2).As a result, it is possible to reduce an adverse influence on control ofthe robot due to the vibration of the camera and/or an adverse influenceon control based on an image captured by, for example, the work pieceW01.

For example, vibration of the robot is sufficiently converged after anoperation of the robot ends. However, when a location at which the workpiece is put by the robot, a location at which the moving work piecemoved is put by the robot, or a location (for example, the support 560 bin the example of FIG. 10) at which a work is executed on the work pieceby the robot is vibrated due to an operation of the robot, it isdetermined that the vibration is not sufficiently converged, and startof a subsequent operation is late, countermeasures can be taken asfollow. That is, an appropriate mounting unit can be selected from thefirst mounting unit 760 to the fourth mounting unit 790 and thevibration measurement device 700 can be installed at the location (seeP706 of FIG. 10).

As a result, the setting device 600 can determine the target vibrationfrequency based on information of the vibration of the location (forexample, the support 560 b) obtained from the vibration measurementdevice 700 and can output a torque control signal in which the vibrationof the location rarely occurs to the robot control device 300 (seereference numeral 340 of FIG. 2). As a result, it is possible to preventa situation in which a standby time until start of the operation duringthe work becomes longer due to the vibration of the location in theoperation of the robot.

In this way, when a portion different from the robot and vibrated by therobot has an influence on control of the robot, the following advantagescan be obtained by mounting the vibration measurement device 700 on sucha portion and causing the setting device 600 to execute the setting.That is, the robot control device 300 can generate a torque controlsignal in which vibration of a portion different from the robot rarelyoccurs and outputs the torque control signal to the robot. As a result,it is possible to reduce an adverse influence on the control of therobot due to the vibration of the portion different from the robot.

On the other hand, as described with reference to FIGS. 4 to 8, therobot control device 300 can switch the frequency component eliminatedthrough the vibration reduction process and generate the torque controlsignal. The robot control device 300 can switch the above-describedplurality of vibration reduction processes of generating the torquecontrol signal in which vibration of the different portion rarely occursand execute the vibration reduction processes in order.

For example, the robot control device 300 can switch a torque controlsignal in which vibration of a portion different from the robot rarelyoccurs and a torque control signal in which vibration of the robotrarely occurs and output the torque control signal to the robot. Therobot control device 300 can also switch a torque control signal inwhich vibration of a first portion different from the robot rarelyoccurs, a torque control signal in which vibration of a second portiondifferent from the robot rarely occurs, and a torque control signal inwhich vibration of the robot rarely occurs and output the torque controlsignal to the robot.

The filter processing unit 340 (see FIG. 2) of the robot control device300 can generate a torque control signal from which a plurality offrequency components are eliminated, as described with reference to FIG.3. Therefore, the robot control device 300 can output a torque controlsignal in which either vibration of a portion different from the robotand vibration of the robot rarely occurs to the robot. Further, therobot control device 300 may also be configured to be able to output atorque control signal in which any of vibration of the first portiondifferent from the robot, vibration of the second portion different fromthe robot, and vibration of the robot rarely occurs to the robot.

The aspect in which the IMU capable of measuring acceleration and anangular velocity in the three axis directions is adopted as thevibration measurement device 700 in the measurement and setting of thetarget vibration frequency has been described above. However, forexample, an acceleration sensor capable of measuring acceleration aroundthree axis that are perpendicular to each other can be adopted as thevibration measurement device installed in a measurement target at thetime of measuring a target vibration frequency. A plurality ofacceleration sensors each capable of measuring acceleration in one axisdirection can also be installed in a measurement target so that the axesof the acceleration sensors are perpendicular to each other and canmeasure acceleration around two axes that are perpendicular to eachother or three axes that are perpendicular to each other. By adoptingthe mounting unit which can be replaced with respect to an output unitfor the acceleration sensor, as described with reference to FIGS. 18 and21, the acceleration sensors can be installed in various measurementtargets.

(2) Measuring and Setting Target Vibration Frequency Using IMU

FIG. 22 is a flowchart illustrating a setting procedure of the vibrationreduction function. In step S210, the vibration measurement device 700is installed in a measurement target. The method of installing thevibration measurement device 700 in the measurement target has beendescribed in the foregoing (1) with reference to FIGS. 1, 10, and 15 to21.

In step S220 of FIG. 22, an excitation program is generated. In theembodiment, the robot is vibrated by driving the servo motor of therobot and causing the robot to execute an operation determined inadvance (hereinafter also referred to as a “specific operation”) insteadof applying an impact on the robot with a hammer. Then, residualvibration of the robot after end of the specific operation is measured.In step S220, a program causing the robot to execute the specificoperation (in the present specification, also referred to as an“excitation program”) is generated.

FIG. 23 is a graph illustrating an example of a specific operationinstructed from a certain servo motor of the robot. In the graph of FIG.23, the horizontal axis represents a time t and the vertical axisrepresents an operation speed V of the servo motor of a certain joint.In a specific operation Mt1, the operation speed V of the servo motorlinearly increases from 0 and subsequently linearly decreases to returnto 0. A time from start to end of the specific operation Mt1 is T.

FIG. 24 is a diagram illustrating a result obtained by executing fastFourier transform on a speed waveform of a specific operation Mt1. InFIG. 24, the horizontal axis represents a frequency and the verticalaxis represents an effective value of power with each frequency. It canbe understood that the specific operation Mt1 has the largest power atfrequency fp1 and the power decreases farther from the frequency.

FIG. 25 is a graph illustrating an example of a specific operation Mt2instructed from a certain servo motor of the robot. In the graph of FIG.25, the horizontal axis represents a time t and the vertical axisrepresents an operation speed V of the servo motor of a certain joint.In a specific operation Mt2, the operation speed V of the servo motorlinearly increases from 0 and linearly decreases to return to 0. Themaximum speed is the same as that of Mt1. Here, a time from start to endof the specific operation Mt2 is 2T.

FIG. 26 is a diagram illustrating a result obtained by executing fastFourier transform on a speed waveform of the specific operation Mt2. InFIG. 26, the horizontal axis represents a frequency and the verticalaxis represents an effective value of power with each frequency. It canbe understood that the specific operation Mt2 has the largest power at afrequency fp2 (<fp1) and the power decreases farther from the frequency.

As understood from FIGS. 23 to 26, power of each frequency componentdiffers in accordance with a waveform of a speed change of the specificoperation. In the specific operation in which acceleration is large anda high-frequency component is large (see FIGS. 23 and 24), residualvibration of a frequency in a broader range can be generated than in thespecific operation (see FIGS. 25 and 26) in which acceleration is smalland a high-frequency component is small. As a result, it is possible todetermine a target vibration frequency more accurately. On the otherhand, since force applied to the robot is small in the specificoperation in which acceleration is small (see FIGS. 25 and 26), there isa small influence on hardware of the robot. In step S220 of FIG. 22, theprogram is generated according to an item (accuracy of measurement orthe small influence on the hardware) weighted in measurement of theresidual vibration. In step S220, the program can also be generated sothat a plurality of specific operations are executed.

Here, to facilitate the technical understanding, the operations with atriangular speed change are indicated (see FIGS. 23 and 25). However, amotion of the robot in the specific operation can be created accordingto the structure of the robot and an attitude of the robot whenvibration desired to be reduced is generated. For example, when residualvibration generated when the arm takes a predetermined attitude isdesired to be reduced, an operation in which the arm takes the attitudeat the time of ending the operation can be set as the specificoperation. When residual vibration generated in an operation of liftinga target and moving the target to another location is desired to bereduced, an operation of executing the operation of lifting the targetand moving the target to the other location by a predetermined movementdistance and at a predetermined movement speed can be set as thespecific operation.

By preparing a plurality of specific operations in advance according toa frequency or a direction of expected natural vibration and/or anattitude of the robot at which vibration is desired to be reduced (seeFIGS. 23 and 25), it is possible to cause the robot to execute aspecific operation capable of detecting a target vibration frequency oftarget vibration accurately and easily.

The above-described plurality of mutually different and typicaloperations can be prepared in advance as a plurality of commands. Theplurality of different operations can also be stored in advance as aplurality of combinations of commands and the parameters in the RAM 630of the setting device 600.

As the plurality of different operations which are specific operations,a plurality of mutually different operations in which an attitude of therobot at the time of ending an operation differs can be exemplified. Insuch an aspect, it is possible to detect the target vibration frequencyof target vibration accurately and easily by preparing the plurality ofspecific operations in advance according to an attitude of the robot inwhich the vibration at the attitude is preferably reduced. As theplurality of mutually different operations, a plurality of operations inwhich a movement speed of the arm until end of the operation differs canbe exemplified. The plurality of operations in which the movement speedof the arm until the end of the operation differs include a plurality ofdifferent operations in which the movement speed of the arm until theend of the operation differs even when the attitude of the arm at thetime of ending the operation is the same.

For example, by designating a parameter of a command in the program, itis possible to designate a joint of the arm of the robot driven in thespecific operation. In such an aspect, it is possible to detect thetarget vibration frequency of the target vibration accurately and easilyby preparing the specific operation in advance according to the joint ofthe robot in which the vibration of the joint is preferably reduced.

In step S230 of FIG. 22, the setting device 600 receives an instructionto execute the program generated in S220 from the user via the key 604,the track point 606, and the touch display 602 displaying a userinterface image and causes the robot control device 300 to execute theprogram generated in step S220. As a result, the robot executes thespecific operation according to the program. A functional unit of thesetting device 600 receiving the instruction to execute the program fromthe user is illustrated as the reception unit 611 in FIG. 15. Thereception unit 611 is realized by the CPU 610 of the setting device 600.

In the robot control device 300, the control signal generation unit 310(see FIG. 2) receives a command indicating the instruction to executethe specific operation from the setting device 600 and outputs thecommand and a position control signal according to a parameter appendedto the command. When an intention to drive a specific joint isdesignated according to a combination of the command the parameter, thecontrol signal generation unit 310 outputs the position control signalso that only the joint is driven.

The position control unit 320, the speed control unit 330, the filterprocessing unit 340, the torque control unit 350, and the servoamplifier 360 cause the servo motor 410 to drive the robot 100 (see FIG.2). In step S230, the filter processing unit 340 outputs the torquecontrol signal received from the speed control unit 330 without changeto the torque control unit 350 without executing the process ofeliminating a specific frequency component.

In step S240 of FIG. 22, the residual vibration after the end of thespecific operation is measured. More specifically, a measurement resultof the vibration obtained by executing the specific operation andmeasured by the vibration measurement device 700 installed in the robotor the like is received from the vibration measurement device 700 by thesetting device 600. The received measurement result of the vibration isstored as a data file in the RAM 630 of the setting device 600. Afunctional unit of the setting device 600 receiving and storing themeasurement result of the vibration is illustrated as the “measurementresult reception unit 613” in FIG. 15. The measurement result receptionunit 613 is realized by the CPU 610 of the setting device 600.

In such an aspect, it is possible to understand the target vibrationfrequency of the robot based on the measurement result of the vibrationobtained by executing the operation of the robot and obtained from thevibration measurement device 700 without adding an impact on the robotwith a hammer or the like from the outside.

The setting device 600 can measure the residual vibration using the endof the command to instruct the specific operation received from therobot control device 300 as a trigger. More specifically, the robotcontrol device 300 notifies the setting device 600 that the positioncontrol signal instructing the end of the operation of the robot 100 issent from the control signal generation unit 310, and then the settingdevice 600 can determine a start time of a time section in which thevibration is measured or a start time of a time section which is set asa processing target to obtain the target vibration frequency in the timesection in which the vibration is measured. For example, a timing atwhich the position control signal instructing the end of the operationof the robot 100 is received and a predetermined time has passed can beset as the start time of the time section which is set as the processingtarget.

When such a process is executed, the user can understand the targetvibration frequency at which there is a high possibility of a controltarget being vibrated most in a target state without designating thestart time of the measurement.

In step S250 of FIG. 22, the measurement result of the vibrationobtained by executing the specific operation is processed in the settingdevice 600 and a processing result is displayed on the display 602.

FIG. 27 is a diagram illustrating an example of an output displayed on adisplay 602 in step S250. The indication of FIG. 27 is a user interfaceUI01 that has not only a function of outputting the processing resultbut also a function of receiving an input for designating processingcontent. The user interface UI01 includes an input window UI11, anangular velocity graph Gg, an acceleration graph Ga, an input windowUI31, a processing target graph Gsa, a start time instruction UI51, anend time instruction UI52, an expanded graph Gsaa, a frequency graph Gf,a frequency designation UI23, a frequency indication UI24, a maximumfrequency indication UI25, and a stop switch UI45.

The input window UI11 is an input window for designating a data file tobe processed among data files of measurement results of vibration storedin the RAM 630 of the setting device 600. Information regarding the datafile designated herein is processed and each indication of the userinterface UI01 is executed based on the result. In such an aspect, theuser can easily understand the target vibration frequency of a controltarget using data of vibration measured in advance.

The stop switch UI45 is a switch for forcibly ending a process executedthrough the user interface UI01.

FIG. 28 is a diagram illustrating the angular velocity graph Gg (alsosee FIG. 27). In FIG. 28, the horizontal axis represents a time and thevertical time represents an angular velocity. In the angular velocitygraph Gg, a temporal change of an angular velocity measured about the X,Y, and Z axes in each rotation is shown based on information receivedfrom the vibration measurement device 700. An angular velocity measuredabout the X axis is indicated as a graph Gx. An angular velocitymeasured about the Y axis is indicated as a graph Gy. An angularvelocity measured about the Z axis is indicated as a graph Gz.

In the angular velocity graph Gg of FIG. 28, the angular velocity Gxmeasured about the X axis first considerably oscillates in the negativedirection and then return to 0. Thereafter, the angular velocity Gxconsiderably oscillates in the positive direction and then returns to 0.The angular velocity Gy measured about the Y axis and the angularvelocity Gz measured about the Z axis are rarely changed. That is, instep S230 of FIG. 22, it can be understood that reciprocation of therotational motion about the X axis is executed as the specificoperation.

FIG. 29 is a diagram illustrating the acceleration graph Ga (also seeFIG. 27). In FIG. 29, the horizontal axis represents a time and thevertical axis represents acceleration. The acceleration graph Ga shows atemporal change of the acceleration in the X, Y, and Z axis directionsbased on information received from the vibration measurement device 700.Acceleration in the X axis direction is indicated as a graph Ax.Acceleration in the Y axis direction is indicated as a graph Ay.Acceleration in the Z axis direction is indicated as a graph Az.

FIG. 30 is a diagram illustrating a processing target graph Gsa (alsosee FIG. 27). In FIG. 30, the horizontal axis represents a time and thevertical axis represents a change amount. The processing target graphGsa shows a target selected between an angular velocity measured aboutthe X, Y, and Z axes in each rotation and acceleration measured aboutthe X, Y, and Z axis directions. The selection of the target is input tothe input window UI31 (see FIG. 27). Here, the acceleration Az in the Zaxis direction is assumed to be selected. As a result, an indication ofthe processing target graph Gsa is similar to the graph Az of theacceleration graph Ga.

In the processing target graph Gsa, a start time instruction UI51 and anend time instruction UI52 are shown. The start time instruction UI51 isa user interface for designating a start time of a processing targetpart in a measurement result shown in the processing target graph Gsa.The end time instruction UI52 is a user interface for designating an endtime of a processing target portion in the measurement result shown inthe processing target graph Gsa. The start time instruction UI51 and theend time instruction UI52 can each be dragged on the touch display 602to be operated in the right and left directions.

In such an aspect, the user can designate a time section to beconsidered except for a portion with much noise in the process ofobtaining the target vibration frequency in vibration data and apply aprocess of obtaining the target vibration frequency. The start timeinstruction UI51 is preferably set at a timing at which a clear changewhich can be recognized by the user in the measurement result shown inthe processing target graph Gsa ends. There is a high possibility that aportion in which the clear change which can be recognized by the user inthe measurement result shown in the processing target graph Gsa is aportion in which a motion of a specific operation is shown.

As default, the start time instruction UI51 is a timing at which aposition control signal instructing the end of the specific operation isoutput from the control signal generation unit 310 as default (see FIG.2). As default, the end time instruction UI52 is a timing at which atime (for example, 0.5 seconds) determined in advance has passed fromthe start time instruction UI51 as default.

In such an aspect, the processing target time section can include a timesection in which a control signal for driving a control target is notoutput. As a result, a parameter indicating a target vibration frequencycalculated based on the vibration data including a portion equivalent tothe residual vibration can be displayed. Therefore, the user canunderstand that the target vibration frequency at which there is a highpossibility of a control target being vibrated most in a state in whichthe control target is to be stopped via the user interface UI01.

The start time instruction UI51 can also be set as a timing at which thepredetermined time T51 (for example, 0.1 seconds) has passed from atiming at which the position control signal instructing the end of thespecific operation is output from the control signal generation unit 310(see FIG. 2). The end time instruction UI52 is a timing at which a timeT52 (T52>T51 and, for example, T52=0.5 seconds) determined in advancehas passed from the start time instruction UI51.

In such an aspect, the processing target time section can be set so thatall of the processing target time sections are time sections in whichthe control signal for driving the control target is not output. As aresult, a parameter indicating the target vibration frequency calculatedbased on the vibration data indicating the residual vibration can bedisplayed in the user interface UI01. Therefore, the user can understandthe target vibration frequency at which there is a high possibility of acontrol target being vibrated most in a state in which the controltarget is to be stopped.

FIG. 31 is a diagram illustrating an expanded graph Gsaa (see FIG. 27).In FIG. 31, the horizontal axis represents a time and the vertical axisrepresents a change amount. The expanded graph Gsaa is a graph formed byexpanding a portion corresponding to a time section partitioned by thestart time instruction UI51 and the end time instruction UI52 in theprocessing target graph Gsa in the vertical axis direction.

FIG. 32 is a diagram illustrating a frequency graph Gf (see FIG. 27). InFIG. 32, the horizontal axis represents a frequency and the verticalaxis represents intensity of each frequency. The frequency graph Gf is agraph that shows a result obtained by executing fast Fourier transformin the expanded graph Gsaa. A frequency designation UI23 is shown in thefrequency graph Gf. In the frequency graph Gf, the frequency designationUI23 is a user interface for designating a frequency in the frequencygraph Gf. The frequency designation UI23 can be dragged on the touchdisplay 602 to be operated in the right and left directions. Thefrequency designation UI23 is automatically located at a position ofpeak (local maximum value) in the frequency graph Gf which is theclosest to a position designated on the touch display 602. The frequencyindicated by the frequency designation UI23 is displayed with anumerical value in the frequency indication UI24 (see FIG. 27).

In the maximum frequency indication UI25 illustrated in FIG. 27, afrequency with maximum power is automatically shown in the frequencygraph Gf. Here, 110.0901 Hz is shown (also see a right portion of thefrequency graph Gf). There is a high possibility that the frequencyshown in the maximum frequency indication UI25 is a vibration frequencyat which a measurement target resonates. Therefore, in such an aspect,the user can understand that the target vibration frequency at whichthere is a high possibility of the control target being vibrated most.

A functional unit of the setting device 600 that instructs the robotcontrol device 300 to execute an operation, processes informationobtained from the vibration measurement device 700, and generates datato display the frequency graph Gf, the maximum frequency indicationUI25, or the like in the user interface UI01 is illustrated as a“processing unit 612” in FIG. 15. The processing unit 612 is realized bythe CPU 610 of the setting device 600.

When the user confirms that maximum frequency indication UI25 and thefrequency graph Gf and subsequently determines that the frequencyindication in the maximum frequency indication UI25 is a frequency to bereduced (the target vibration frequency of the measurement target), thefollowing process is executed. That is, in step S260 of FIG. 22, thefrequency is input as a frequency component to be eliminated to therobot control device 300 via the key 604, the track point 606, and thetouch display 602 displaying a user interface image. The robot controldevice 300 stores the frequency as the parameter Param1 of the vibrationreduction function of a predetermined number in the RAM 301 or the ROM302 (see FIG. 3).

When it is determined that the frequency displayed in the maximumfrequency indication UI25 is not the frequency to be reduced as theresult obtained by confirming the maximum frequency indication UI25 andthe frequency graph Gf, the user operates the touch display 602 on whichthe user interface image is displayed and moves the frequencydesignation UI23 near another frequency in the frequency graph Gfconsidered to be the target vibration frequency of the measurementtarget. Then, the frequency designation UI23 is automatically located atthe position of peak nearby and the frequency is displayed in thefrequency indication UI24. The user can input the frequency as thefrequency component to be eliminated to the robot control device 300 viathe touch display 602 or the like of the setting device 600 in step S260of FIG. 22.

In such an aspect, the user can easily understand information regardingthe target vibration frequency of the robot via an input and outputdevice of the setting device 600. A functional unit of the settingdevice 600 executing the indications described with reference to FIGS.27 and 31 on the display 602 is a “display control unit 615” (see FIG.15).

FIG. 33 is a diagram illustrating another example Gf01 of the frequencygraph Gf (see FIGS. 27 and 32). More specifically, FIG. 33 illustratesthe frequency graph Gf01 when the vibration measurement device 700 isinstalled in the end effector 200 b (see FIG. 10). An installationposition of the vibration measurement device 700 corresponding to FIG.33 is indicated by P701 in FIG. 10. In this case, it can be understoodthat the target vibration frequency is shown as 30 Hz, 48 Hz, or 80 Hz.

FIG. 34 is a diagram illustrating still another example Gf02 of thefrequency graph Gf (see FIGS. 27 and 32). More specifically, FIG. 34illustrates the frequency graph Gf02 when the vibration measurementdevice 700 is installed in the arm 110 b of the robot 100 b. Aninstallation position of the vibration measurement device 700corresponding to FIG. 34 is indicated by P702 in FIG. 10. In this case,it can be understood that the target vibration frequency is shown as 30Hz, 33 Hz, 49 Hz, or 80 Hz.

FIG. 35 is a diagram illustrating still another example Gf03 of thefrequency graph Gf (see FIGS. 27 and 32). More specifically, FIG. 35illustrates the frequency graph Gf03 when the vibration measurementdevice 700 is installed in the frame F100 b of the robot 100 b. Aninstallation position of the vibration measurement device 700corresponding to FIG. 35 is indicated by P703 in FIG. 10. In this case,it can be understood that the target vibration frequency is shown as 30Hz or 33 Hz.

FIG. 36 is a diagram illustrating still another example Gf04 of thefrequency graph Gf (see FIGS. 27 and 32). More specifically, FIG. 36illustrates the frequency graph Gf01 when the vibration measurementdevice 700 is installed in the post F400 b in which the camera 400 b isinstalled. An installation position of the vibration measurement device700 corresponding to FIG. 33 is indicated by P704 in FIG. 10. In thiscase, it can be understood that the target vibration frequency is shownas 30 Hz or 72 Hz.

In the examples of FIGS. 33 to 36, the frequency graphs Gf01 to Gf04show the frequency regions equal to or greater than 30 Hz. However, thefrequency graph Gf may show a region equal to or less than 30 Hz. Thatis, the frequency region suggested by the frequency graph Gf can be setaccording to measured vibration.

As understood from the frequency graphs Gf01 to Gf04 of FIGS. 33 to 36,the vibration frequency of the vibration differs depending on a portionincluded in the robot system. Therefore, in a case in which a portiondifferent from the robot and vibrated by the robot has an influence oncontrol of the robot, the influence of the portion may not be reducedeven when the torque control signal in which a component of the targetvibration frequency of the robot is reduced. As in the embodiment, bypreparing the vibration measurement device 700 serving as a measurementunit that measures vibration and installing the vibration measurementdevice 700 not only in the robot but also in a portion which is aportion other than the robot and has an influence on control of therobot, it is possible to obtain the following advantages. That is, in acase in which a portion different from the robot and vibrated by therobot has an influence on control of the robot, the torque controlsignal can be altered so that vibration of the portion is reduced andthe torque control signal can be output. As a result, it is possible toreduce an adverse influence of vibration of a portion different from therobot on the control of the robot.

When one or more acceleration sensors capable of measuring accelerationaround three axes perpendicular to each other are adopted as thevibration measurement devices instead of the IMU, the angular velocityaround the three axes can be obtained using measured values of theacceleration around the three axes and distances between the center ofthe rotation of a measurement target and the acceleration sensors. Whenthe acceleration sensor capable of measuring the acceleration around thethree axes perpendicular to each other is adopted as the vibrationmeasurement devices, the processing unit 612 of the setting device 600displays the angular velocity graph Gg of the user interface UI01 byexecuting the process (see FIGS. 15 and 27). When the IMU is adopted asthe vibration measurement device, measured values of the acceleration inthree axis directions perpendicular to each other and measured values ofangular velocities around the three axis directions perpendicular toeach other are obtained from the IMU and the processing unit 612 of thesetting device 600 displays the acceleration graph Ga and the angularvelocity graph Gg of the user interface UI01.

(3) Measuring and Setting Target Vibration Frequency Using TriaxialAcceleration Sensor

FIG. 37A is a diagram illustrating another user interface UI02 for aninput for designation of processing content and an output of aprocessing result. The user interface UI02 is a user interfaceappropriately adopted when an acceleration sensor capable of measuringacceleration around three axes perpendicular to each other is adopted asthe vibration measurement device. Here, the user interface UI02 can beapplied even when the IMU is adopted as the vibration measurementdevice.

The user interface UI02 includes an input window UI11 and a stop switchUI45. The user interface UI02 further includes a measurement startbutton UI12, a measurement time designation window UI50, and maximumfrequency indication UI26 to UI28.

However, the user interface UI02 does not include the angular velocitygraph Gg, the acceleration graph Ga, the input window UI31, theprocessing target graph Gsa, the start time instruction UI51, the endtime instruction UI52, the expanded graph Gsaa, the frequency graph Gf,the frequency designation UI23, and the frequency indication UI24. Insuch a configuration, the user can understand a frequency at which thereis a high possibility of the residual vibration being reduced withoutbeing misled about many pieces of information and without executing acomplicated operation (see UI26 to UI28).

Functions of the input window UI11 and the stop switch UI45 are the sameas the functions of the input window UI11 and the stop switch UI45 ofthe user interface UI01.

The measurement start button UI12 is a switch for causing the settingdevice 600 and the robot control device 300 to execute the processes ofsteps S230 and S240 of FIG. 22. In this case, a program prepared inadvance and stored in the ROM 640 of the setting device 600 is used as aprogram causing the robot to execute a specific operation. As theprogram prepared in advance, various programs with a condition (forexample, a direction of an operation or an attitude of the robot) foroperating the robot is different can be prepared.

The measurement time designation window UI50 is an input window fordesignating a length of a time section in which vibration is measured.

The maximum frequency indication UI26 to UI28 displays parameterscorresponding to the frequency with the maximum power at eachacceleration in the X, Y, and Z axis directions in the residualvibration after the specific operation. The user interface UI02 does notinclude the input window UI31 (see FIG. 27). Therefore, in the userinterface UI02, frequencies with the maximum power of acceleration inthe X, Y, and Z axis directions are displayed as default. At this time,the frequencies in the X, Y, and Z axis directions are shown in thedescending order of power, that is, the descending order of amplitude.When such a process is executed, the user can easily understand in whichdirection the control target considerably vibrates along with the targetvibration frequency of the vibration in the direction.

FIG. 37B is a diagram illustrating still another user interface UI02 bfor an input for designation of processing content and an output of aprocessing result. As in the user interface UI02, the user interfaceUI02 b is a user interface appropriately adopted when an accelerationsensor capable of measuring acceleration around three axes perpendicularto each other is adopted as the vibration measurement device. Here, theuser interface UI02 b can be applied even when the IMU is adopted as thevibration measurement device.

The user interface UI02 b includes a measurement start button UI12, ameasurement time start designation window UI50, and a stop switch UI45.The user interface UI02 b further includes a program number designationwindow UI62, a maximum frequency indication UI29, and a maximumacceleration graph Gax.

However, the user interface UI02 b does not include the angular velocitygraph Gg, the acceleration graph Ga, the input window UI31, theprocessing target graph Gsa, the start time instruction UI51, the endtime instruction UI52, the expanded graph Gsaa, the frequency graph Gf,the frequency designation UI23, the frequency indication UI24, the inputwindow UI11, and the maximum frequency indication UI26 to UI28. In sucha configuration, the user can understand a frequency at which there is ahigh possibility of the residual vibration being reduced without beingmisled about many pieces of information and without operating acomplicated operation (see UI29).

A function of the stop switch UI45 is the same as the function of thestop switch UI45 of the user interfaces UI01 and UI02. A function of themeasurement time designation window UI50 is the same as the function ofthe measurement time designation window UI50 of the user interface UI02.

The measurement start button UI12 is a switch for causing the settingdevice 600 and the robot control device 300 to execute the processes ofsteps S230 and S240 of FIG. 22. As a program causing the robot toexecute a specific operation, a program for which a corresponding numberis input via the program number designation window UI62 is used amongthe programs prepared in advance and stored in the ROM 640 of thesetting device 600. As the programs prepared in advance, variousprograms with a condition (for example, a direction of an operation oran attitude of the robot) for operating the robot is different can beprepared.

The maximum frequency indication UI29 shows a parameter corresponding toone frequency with the maximum power among frequencies of eachacceleration in the X, Y, and Z axis directions in the residualvibration after the specific operation. When such a process is executed,the user can easily understand the frequency with the maximum power inthe residual vibration, that is, the frequency of the vibration to bereduced without considering in which direction the control targetconsiderably vibrates.

The maximum acceleration graph Gax shows a temporal change ofacceleration of an axis to which the vibration frequency with themaximum power belongs among the acceleration in the X, Y, and Z axisdirections based on acceleration information of the three axes receivedfrom the acceleration sensor. When the vibration reduction process isexecuted to measure the acceleration, the amplitude of the accelerationdisplayed in the maximum acceleration graph Gax is reduced further thanwhen the acceleration is measured without executing the vibrationreduction process. The user can intuitively understand a differencebetween results of the case in which the vibration reduction process isnot executed and the case in which the vibration reduction process isexecuted through the indication of the maximum acceleration graph Gax.

The user interfaces UI01, UI02, and UI02 b in FIGS. 27, 37A, and 37B aredisplayed via the indication on the touch display 602 on which the robotis operated by the robot instruction device 600 functioning as thesetting device. That is, a screen for operating the robot and a screenfor setting the vibration reduction function is switched and indicatedon the touch display 602. The screens can be switched through the userinterface of each screen. Then, each instruction is input through theindication of the touch display 602 of the robot instruction device 600.

In such an aspect, the user can call the indication functioning as anoperation unit through the indication for an accustomed operation forthe robot (see the user interfaces UI01, UI02, and UI02 b of FIGS. 27,37A, and 37B) and measure the target vibration frequency of a target.

In the present specification, the part P703 of the frame F100 b and thepart P704 of the post F400 b in FIG. 10 are also referred to as“portions vibrated by the robot”. The vibration measurement device 700(see FIG. P703) installed in the frame F100 b and the vibrationmeasurement device 700 (see FIG. P704) installed in the post F400 b arealso referred to as “first detector”. A torque control signal which isgenerated by the filter processing unit 340 and in which a process ofthe vibration reduction function is set based on an output from thevibration measurement device 700 is also referred to as a “secondcontrol signal”. The filter processing unit 340 in FIG. 2 is alsoreferred to as a “control signal alternation unit”.

In the present specification, the vibration measurement device 700 (seeFIG. P702 in FIG. 10) installed at the distal end of the arm 110 b ofthe robot 100 b in FIG. 10 and the vibration measurement device 700installed in the arm 110 of the robot 100 in FIG. 15 are also referredto as “second detector”. A process of the vibration reduction functionis set based on an output from the vibration measurement device 700 anda torque control signal generated by the filter processing unit 340 isalso referred to as a “third control signal”.

The support 560 b function as “one or more locations among a location inwhich the work piece which is a work target of the foregoing robot isput by the robot, a location in which the work piece to be moved by therobot is put before the work piece is moved, and a location in which therobot executes a work on the work piece”.

The vibration measurement device 700 (see P703) installed in the frameF100 b, the vibration measurement device 700 (see P704) installed in thepost F400 b, and the robot control device 300 and the setting device 600(the robot instruction device 600) are also referred to as a “controlsystem”. The measurement unit 740 and the output unit 750 are alsoreferred to as an “output unit”. The first mounting units 760 to thefourth mounting unit 790 are also referred to a “mounting unit”.

(4) Measuring and Setting Plurality of Target Vibration Frequencies

FIG. 38 is a flowchart illustrating another example of a settingprocedure of the vibration reduction function. Since processes of stepsS210 to S260 of FIG. 38 are the same as the processes of steps S210 toS260 illustrated in FIG. 22, the processes of steps S210 to S260 willnot be described. Through the processes until step S260, a firstfrequency to be reduced from the torque control signal is set (see F11,F21, and F31 of FIG. 3).

In step S330, as in step S230, the program generated in step S220 isexecuted in the robot control device 300 and the robot executes aspecific operation according to the program. More specifically, thecontrol signal generation unit 310 (see FIG. 2) receives a commandindicating an instruction to execute the specific operation and outputsa position control signal according to the command and a parameterappended to the command.

The position control unit 320, the speed control unit 330, the filterprocessing unit 340, the torque control unit 350, and the servoamplifier 360 drive the servo motor 410 of the robot 100 according tothe position control signal (see FIG. 2). Here, in step S330, the filterprocessing unit 340 executes the process of eliminating the specificfrequency component set in step S260, alters the torque control signalreceived from the speed control unit 330, and output the torque controlsignal to the torque control unit 350.

In step S340, the residual vibration after the end of the specificoperation is measured through the same process as step S240. In stepS350, the measurement result of the vibration obtained by executing thespecific operation of S330 is processed in the setting device 600through the same process as step S250 and a processing result isdisplayed on the display 602 (see FIG. 27).

FIG. 39 is a graph equivalent to the expanded graph Gsaa (see FIGS. 27and 31) displayed in the step S250 of FIG. 38. Here, to facilitate thetechnical understanding, the accelerations Ax, Ay, and Az of all the X,Y, and Z axes are illustrated here.

FIG. 40 is a graph equivalent to the frequency graph Gf (see FIGS. 27and 32) displayed in step S250 of FIG. 38. Here, to facilitate thetechnical understanding, results of fast Fourier transform on theaccelerations Ax, Ay, and Az of all the X, Y, and Z axes are illustratedhere.

FIG. 41 is a graph equivalent to the expanded graph Gsaa (see FIGS. 27and 31) displayed in step S350 of FIG. 38. Here, to facilitate thetechnical understanding, the accelerations Ax, Ay, and Az of all the X,Y, and Z axes are illustrated here.

FIG. 42 is a graph equivalent to the frequency graph Gf (see FIGS. 27and 32) displayed in step S350 of FIG. 38. Here, to facilitate thetechnical understanding, results of fast Fourier transform on theaccelerations Ax, Ay, and Az of all the X, Y, and Z axes are illustratedhere.

As understood when FIG. 39 is compared with FIG. 41 and FIG. 40 iscompared with FIG. 42, the largest vibration near 34 Hz of theacceleration Az (indicated by a one-dot chain line) in the Z axisdirection is reduced through the setting of step S260 of FIG. 38 (inparticular, see FIGS. 40 and 42).

In step S355 of FIG. 38, the user confirms the expanded graph Gsaa, thefrequency graph Gf, and the maximum frequency indication UI25 of theuser interface UI01 (see FIG. 27) and determines whether the residualvibration is sufficiently reduced. When the residual vibration issufficiently reduced, the robot is managed in step S357 according to thesetting of the parameter Param1 executed in step S260.

Conversely, when the residual vibration is not sufficiently reduced instep S355, the process proceeds to step S360. In step S360, the userconfirms the expanded graph Gsaa, the frequency graph Gf, and themaximum frequency indication UI25 of the user interface UI01 (see FIGS.27, 41, and 42) and specifies the frequency with the maximum power inthe remaining vibration. Then, the user additionally inputs thefrequency as a frequency component to be eliminated to the robot controldevice 300 via the touch display 602, the key 604, and the track point606 of the setting device 600. The robot control device 300 stores thefrequency as the parameter Param2 of the vibration reduction function ofthe predetermined number (see F32 of FIG. 3).

In step S430, as in steps S230 and S330, the program generated in stepS220 is executed in the robot control device 300 and the robot executesthe specific operation according to the program. Here, in step S430, thefilter processing unit 340 executes the process of eliminating twofrequency components set in steps S260 and S360, alters the torquecontrol signal received from the speed control unit 330, and outputs thetorque control signal to the torque control unit 350.

In step S440, the residual vibration after the end of the specificoperation is measured through the same processes as steps S240 and S340.In step S450, the measurement result of the vibration obtained byexecuting the specific operation of S430 is processed in the settingdevice 600 through the same processes as steps S250 and S350 and aprocessing result is displayed on the display 602 (see FIG. 27).

FIG. 43 is a graph equivalent to the expanded graph Gsaa (see FIGS. 27and 31) displayed in step S450 of FIG. 38. Here, to facilitate thetechnical understanding, the accelerations Ax, Ay, and Az of all the X,Y, and Z axes are illustrated here.

FIG. 44 is a graph equivalent to the frequency graph Gf (see FIGS. 27and 32) displayed in step S450 of FIG. 38. Here, to facilitate thetechnical understanding, results of fast Fourier transform on theaccelerations Ax, Ay, and Az of all the X, Y, and Z axes are illustratedhere.

As understood when FIG. 41 is compared with FIG. 43 and FIG. 42 iscompared with FIG. 44, the largest vibration near 31 Hz of theacceleration Az (indicated by a one-dot chain line) in the Z axisdirection is reduced through the setting of step S360 of FIG. 38 (inparticular, see FIGS. 42 and 44).

In step S455, the user confirms the expanded graph Gsaa, the frequencygraph Gf, and the maximum frequency indication UI25 of the userinterface UI01 (see FIG. 27) and determines whether the residualvibration is sufficiently reduced. When the residual vibration issufficiently reduced, the robot is managed in step S457 according to thesetting of the parameters Param1 and Param2 executed in steps S260 andS360.

In such an aspect, the user can compare the vibration before and afterthe setting based on the user interface UI01 on the touch display 602,and then can execute additional frequency setting as necessary. That is,the user compares the vibration occurring in the specific operation instep S230 with the vibration occurring in step S330 in the operationaccording to the torque control signal obtained by reducing the targetvibration frequency component from the torque control signal instructingthe specific operation, and then can execute additional frequencysetting as necessary.

Conversely, when the residual vibration is not sufficiently reduced instep S455, the process proceeds to step S470. In step S470, the usercontacts a maintenance service provider.

(5) Measuring and Setting Target Vibration Frequency Using Force Sensor

The aspects in which the vibration measurement device is installed ineach unit including the robot and the vibration reduction function isset have been described above. However, when the robot includes a forcesensor (see reference numeral 190 of FIG. 1 and reference numeral 190 bof FIG. 10), vibration can also be measured using the force sensorincluded in the robot instead of the vibration measurement device.

The force sensor 190 can measure forces Fx, Fy, and Fz in the three axesdirections of the X, Y, and Z axes and torques Tx, Ty, and Tz around theX, Y, and Z axes acted on the end effector 200. Here, an aspect in whichvibration occurring in a specific operation is measured and thevibration reduction function is set using the forces Fx, Fy, and Fz inthe three axes directions of the X, Y, and Z axes and the torques Tx,Ty, and Tz around the X, Y, and Z axes obtained by the force sensor 190instead of the acceleration in the X, Y, and Z axis directions and theangular velocities about the X, Y, and Z axis directions in eachrotation output by the vibration measurement device 700 will bedescribed. In such an aspect, the target vibration frequency can bemeasured effectively utilizing the force sensor installed in the robotas a control target.

FIG. 45 is a diagram illustrating a graph Gid and still another userinterface UI03 for an input for designation of processing content and anoutput of a processing result. The user interface UI03 includes an inputwindow UI91, an expanded graph Gsab, a frequency graph Gf00, and aspectrum indication UI94 fx.

The input window UI91 is a user interface for selecting any of theforces Fx, Fy, and Fz in the three axes directions of the X, Y, and Zaxes and the torques Tx, Ty, and Tz around the X, Y, and Z axes. Here,the force Fx in the X axis direction is selected. The input window UI91is equivalent to the input window UI31 in the user interface UI01 ofFIG. 27.

The expanded graph Gsab is a graph that expands and shows the residualvibration of the measurement result selected in the input window UI91.The expanded graph Gsab is equivalent to the expanded graph Gsaa in theuser interface UI01 of FIG. 27. The residual vibration of the force Fxin the X axis direction after the specific operation is illustrated inFIG. 45.

The spectrum indication UI94 fx shows a result obtained by executingshort-time Fourier transform on the temporal change (the temporal changeof the force Fx in the X axis direction) of a measured value selected inthe input window UI31. In the spectrum indication UI94 fx, thehorizontal axis represents a time and the vertical axis represents afrequency. The magnitude of the power of each frequency for each timeindicates a change in color. In such an aspect, the user can understandan aspect in which the power of the frequency component is changed overtime. In the example of FIG. 45, it can be understood that there is apeak of the power near 60 Hz at a time near the middle of a time sectionshown in the spectrum indication UI94 fx. In FIG. 45, to facilitate thetechnical understanding, the change in color in the spectrum indicationUI94 fx is changed in two stages.

The frequency graph Gf00 shows a result obtained by summing results(frequency distribution) shown in the spectrum indication UI94 fx in thetime axis direction. In the frequency graph Gf00, the vertical axisrepresents a frequency and the horizontal axis represents intensity. Thefrequency graph Gf00 in FIG. 45 corresponds to the frequency graph Gf inFIG. 27.

The graph Gid is a graph that displays an indication corresponding to astep of a recent command by which execution is completed in the timesection of a vibration measurement target among command executed in therobot. As a result, currently, the user can understand which command isin progress in a process. In such an aspect, the user can understand thetarget vibration frequency while confirming a command to instruct aspecific operation of generating the residual vibration when thespecific operation is executed for measurement with a plurality ofcommands. In the example of FIG. 45, a command of a command ID2.0 is arecent command by which execution is completed.

FIG. 46 is a diagram illustrating the graph Gid and still another userinterface UI04 for an input for designation of processing content and anoutput of a processing result. The function of the graph Gid is the sameas the function of the graph Gid illustrated in FIG. 45.

The user interface UI04 of FIG. 46 includes spectrum indication UI94 fx,UI94 fy, UI94 fz, UI94 tx, UI94 ty, and UI94 tz However, the userinterface UI04 does not include the input window UI91, the expandedgraph Gsab, and the frequency graph Gf00.

The spectrum indication UI94 fx indicates a result obtained by executingthe short-time Fourier transform on the temporal change of the force Fxin the X axis direction. Content of the spectrum indication UI94 fx isthe same as that of the function of the spectrum indication UI94 fxillustrated in FIG. 45. The spectrum indication UI94 fy shows a resultobtained by executing the short-time Fourier transform on the temporalchange of the force Fy in the Y axis direction. The spectrum indicationUI94 fz shows a result obtained by executing the short-time Fouriertransform on the temporal change of the force Fz in the Z axisdirection.

The spectrum indication UI94 tx shows a result obtained by executing theshort-time Fourier transform on the temporal change of the torque Tx inthe X axis direction. The spectrum indication UI94 ty shows a resultobtained by executing the short-time Fourier transform on the temporalchange of the torque Ty in the Y axis direction. The spectrum indicationUI94 tz shows a result obtained by executing the short-time Fouriertransform on the temporal change of the torque Tz in the Z axisdirection.

That is, the user interface UI04 can display an indication of power ofeach frequency component with regard to vibration of forces or torquesin a plurality of mutually different directions. In such an aspect, theuser can understand an aspect in which the power of the frequencycomponent is changed over time in the plurality of different directions.

In the examples of FIGS. 45 and 46, the spectrum indication UI94 fx toUI94 fz and UI94 tx to UI94 tz indicate frequency regions equal to orgreater than 30 Hz. However, the spectrum indication UI94 fx to UI94 fzand UI94 tx to UI94 tz may indicate regions equal to or less than 30 Hz.That is, the frequency regions suggested by the spectrum indication UI94fx to UI94 fz and UI94 tx to UI94 tz can be set according to themeasured vibration.

In the present specification, the control signal generation unit 310 isalso referred to as a “reception unit”. The position control unit 320,the speed control unit 330, the filter processing unit 340, the torquecontrol unit 350, and the servo amplifier 360 are also referred to as an“execution unit”. The servo motor 410 is also referred to as a “drivingunit”. The vibration measurement device 700 and the force sensors 190and 190 b are also referred to as a “measurement unit”. The measurementresult reception unit 613 serving as a functional unit of the settingdevice 600 is also referred to as a “measurement result reception unit”.The robot control device 300 and the setting device 600 (the robotinstruction device 600) function as a “control device”.

A plurality of combinations of the commands instructing a plurality ofmutually different operations and parameters of the commands function as“an instruction to execute operations as a plurality of mutuallydifferent types of specific operations”. A combination of a command todesignate the joint of the arm of the robot to be driven and a parameterfunctions as “an instruction to execute the specific operation includingthe designation of one or more joints among the plurality of joints”.

In the present specification, the reception unit 611 of the settingdevice 600 is also referred to as a “reception unit”. The instruction toexecute the program in step S230 of FIG. 22 is also referred to as a“first instruction”. The touch display 602, the key 604, and the trackpoint 606 also function as an “operation unit”. The frequency graph Gfand the maximum frequency indication UI25 function as “informationregarding a target vibration frequency of a control target”. The display602 of the setting device 600 is also referred to as a “display unit”.The display control unit 615 of the setting device 600 is also referredto as a “display control unit”. A time section designated with the starttime instruction UI51 and the end time instruction UI52 is also referredto as a “time section indicating vibration of a control target” or a“certain time section”.

Designation of a data file input to the input window UI11 is alsoreferred to as a “second instruction”. The vibration measurement device700 is also referred to as a “measurement unit”. The user interface UI01in step S250 is also referred to as an “indication based on thevibration data”. The user interface UI01 in step S350 functions as an“indication based on the vibration data indicating vibration of thecontrol target operated based on the second control signal obtained byreducing the specific frequency component from the first control signalinstructing an operation which is a cause of the vibration of thecontrol target in the time section”.

The frequency displayed in the maximum frequency indication UI25functions as “a parameter indicating at least one of the targetvibration frequencies”. The designation of the position of the starttime instruction UI51 functions as “an instruction to designate a starttime of the time section”.

An input of the designation of a target in the input windows UI31 andUI91 functions as “axis designation for designation of a direction ofvibration of the displayed target vibration frequency”. The processingtarget graph Gsa, the expanded graph Gsaa, the frequency graph Gf, thefrequency indication UI24, and the maximum frequency indication UI25 arealso referred to as “information regarding the target vibrationfrequency of the vibration of the designated direction”.

The UI04 including the spectrum indication UI94 fx, UI94 fy, UI94 fz,UI94 tx, UI94 ty, UI94 tz is also referred to as a “spectrum indicationunit”. The X, Y, and Z axes function as a “plurality of mutuallydifferent directions”. The graph Gid functions as an “indicationcorresponding to step of a recent command”.

(6) Installing Vibration Measurement Device in Another Robot System

In the foregoing embodiment, the vibration measurement device isinstalled in the robots 100 and 100 b which are vibration reductiontargets, the cameras 400 and 400 b included in the robot systemincluding the robots, and the frame F100 b or the post F400 b in whichthe robots and the cameras (see P701 to P706 of FIG. 10). However, thevibration measurement device can be installed in the robot which is avibration reduction target or a location other than the constituentelements of the robot system including the robot.

FIG. 47 is a diagram illustrating two robot systems RS100 b and RS100 cdisposed side by side. The two robot systems RS100 b and RS100 c may berobots that are responsible for upstream and downstream productionprocesses of manufacturing the same product or may be robots included indifferent production lines that manufacture other products.

The configurations of the robot 100 b and the frame F100 b included inthe robot system RS100 b have already been described (see FIG. 10). Theconfigurations of the robot 100 c and the frame F100 c included in therobot system RS100 c are the same as the configurations of the robot 100b and the frame F100 b. For each constituent element of the robot systemRS100 c corresponding to each constituent element of the robot systemRS100 b, reference numeral c is given and used instead of referencenumeral b among the reference numerals of the constituent elements ofthe robot system RS100 b.

The end effector 200 c of the robot system RS100 c can be vibrated dueto a motion of the robot 100 b of the nearby robot system RS100 b. Acamera 400 c and a support 560 c of the robot system RS100 c can also bevibrated due to a motion of the robot 100 b of the nearby robot systemRS100 b. As a result, precision of a motion of the robot 100 c maydeteriorate due to the robot 100 b of the nearby robot system RS100 band a subsequent operation start timing may also be late. Therefore, inthe embodiment to be described here, a frequency component to beeliminated is determined so that the constituent elements of the robotsystem RS100 c are not vibrated in the setting of the vibrationreduction function in FIG. 22 in the robot system RS100 b which is atarget.

In step S210 of FIG. 22, the vibration measurement device is installedin a measurement target. For example, the vibration measurement device700 is installed in the frame F100 c of the robot system RS100 c (seeP803 of FIG. 47). Then, the processes of steps S220 and the subsequentsteps are executed on the robot system RS100 b. As a result, a targetfrequency at which a torque control signal in which the frame F100 c israrely vibrated can be generated can be set by the filter setting unit345 (see FIG. 2) of the robot control device of the robot system RS100b.

In step S210 of FIG. 22, for example, the vibration measurement device700 can also be installed in a post F400 c in which the camera 400 c isinstalled in the robot system RS100 c with regard to the robot systemRS100 b (see P804 of FIG. 47). Then, the processes of step S220 and thesubsequent steps are executed. As a result, a target frequency at whicha torque control signal in which the camera 400 c installed in the postF400 c is rarely vibrated can be generated can be set by the filtersetting unit 345 (see FIG. 2) of the robot control device of the robotsystem RS100 b.

Similarly, in step S210 of FIG. 22, for example, the vibrationmeasurement device 700 can also be installed in the support 560 c of therobot system RS100 c (see P804 of FIG. 47). The support 560 c is astructure on which the work piece W02 which is a processing target ofthe robot system RS100 c can be loaded. Then, the processes of step S220and the subsequent steps are executed on the robot system RS100 b. As aresult, a target frequency at which a torque control signal in which thesupport 560 c and the work piece W02 on the support 560 c are rarelyvibrated can be generated can be set by the filter setting unit 345 (seeFIG. 2) of the robot control device of the robot system RS100 b.

Similarly, the vibration measurement device can also be installed in thecamera 400 c (see P805 of FIG. 47), the end effector 200 c (see P801 ofFIG. 47), and the arm 110 c (see P802 of FIG. 47) included in the robotsystem RS100 c. As a result, a target frequency at which a torquecontrol signal in which these portions in the vibration measurementdevice is installed are rarely vibrated can be generated can be set bythe filter setting unit 345 (see FIG. 2) of the robot control device ofthe robot system RS100 b.

In the present specification, the portions P801 to P806 of the robotsystem RS100 c in FIG. 47 are also referred to as “portions vibrated bythe robot”. The vibration measurement device 700 installed in theportions is also referred to as a “first detector”. A torque controlsignal which is generated by the filter processing unit 340 and in whicha process of the vibration reduction function is set based on an outputfrom the vibration measurement device 700 is also referred to as a“second control signal”.

D. Modification Examples D1. Modification Example 1

(1) In the foregoing embodiment, there are the plurality of thirdcontrol signals output between the earlier and later control signals(see FIGS. 6 and 8). However, only one third control signal may beoutput between an output of the earlier control signal and an output ofthe later control signal.

(2) In the foregoing embodiment, there are the plurality of secondcontrol signals generated by reducing different frequency components(see numbers 1 to 15 of FIG. 3). However, an aspect in which only onesecond control signal in which the frequency component is reduced can begenerated and applied can also be set.

(3) In the foregoing embodiment, the third control signal can beobtained as a weighted mean of the earlier and later control signals.However, the third control signal can be determined also considering acomponent other than the earlier and later control signals.

(4) In the foregoing embodiment, when both a deviation before and afterthe control signal switching at the position of the distal end of thearm 110 of the robot 100 and a deviation before and after the controlsignal switching at the speed of the distal end of the arm 110 of therobot 100 are less than the threshold, the control signal is switched(see FIG. 9). However, the switching of the control signal may be set asa condition that the deviation in the rotational position and thedeviation in the speed of the motor driving the robot are equal to orless than the predetermined thresholds. When the condition that thedeviation in the position is less than the threshold, the control signalmay also be switched regardless of the deviation in the speed.

(5) In the foregoing embodiment, the filter processing unit 340 servingas the second control signal generation unit eliminates the frequencycomponent using the band-elimination filter. However, it is alsopossible to realize an aspect in which the second control signalgeneration unit generates the second control signal from the firstcontrol signal using a notch filter or a bandpass filter. When thesecond control signal is generated from the first control signal, theaspect in which the specific frequency component is reduced can also beadopted in addition to the aspect in which the specific frequencycomponent is eliminated.

(6) In the foregoing embodiment, the vibration reduction function isexecuted on the torque control signal. However, the vibration reductionfunction can be applied to a control signal or the amount of a currentof the acceleration and can also be applied to the speed control signalor the position control signal. In the vibration reduction function, thetarget control signal is subjected to Fourier transform, a specificfrequency component in the control signal is reduced, and inversetransform is executed to generate a new control signal. Therefore, thevibration reduction function can be applied to various parameters thathave a relation transformed by calculus and proportion based on thetorque control signal exemplified above.

(7) In the multiaxial robot, a frequency different for each axis can beset as a frequency which is to be reduced from the control signal (seereference numerals 340 and 345 of FIG. 2). In such an aspect, the filterprocessing unit 340 receives a control signal with one or morefrequencies which are to be eliminated from the filter setting unit 345with regard to each of the plurality of joints. Then, the filterprocessing unit 340 executes a process of eliminating one or morefrequency components according to the control signal from the filtersetting unit 345 on the torque control signal output with regard to eachof the plurality of joints by the speed control unit 330, generates anew torque control signal, and outputs the new torque control signal.When the earlier torque control signal is converted into the latertorque control signal with regard to each of the plurality of joints,the filter processing unit 340 may generate a value of the third torquecontrol signal by a weighted mean of the values of two torque controlsignals and output the value of the third torque control signal. In suchan aspect, when the frequency to be reduced in accordance with the joint(axis) differs, vibration of each axis can be effectively reduced.

In the foregoing aspect, the frequency component to be reduced from thecontrol signal may be matched in two or more axes. In the presentspecification, what a frequency component to be reduced with regard to acertain joint (axis) can be set without being limited to a frequency tobe reduced with regard to another joint (axis) is referred to as what afrequency to be reduced for each joint (axis) is “independent”. Even inthe aspect in which the frequency component to be reduced with regard toeach joint (axis) can be set independently, the same frequency componentcan be set accidentally or intentionally with regard to the plurality ofjoints.

On the other hand, the vibration reduction process can also be executedat the same frequency with regard to each axis of a multiaxial robot(see reference numerals 340 and 345 of FIG. 2). In the multiaxial robot,when each axis is controlled in a cooperation manner and a controlsignal with a specific frequency component is provided or a controlsignal with no specific frequency component is provided for each axis,an unexpected torque change or a position aberration of a path occurs insome cases. For this reason, by executing the vibration reductionprocess at the same frequency with regard to each axis of the multiaxialrobot, it is possible to reduce a possibility of such a situationoccurring.

Further, an axis not subjected to the vibration reduction process and anaxis subjected to the vibration reduction process can be set with regardto each axis of the multiaxial robot (see reference numerals 340 and 345of FIG. 2). In such an aspect, the filter processing unit 340 receivesdesignation of some one or more of the joints to be subjected to thevibration reduction process among the plurality of joints. The filterprocessing unit 340 may receive designation of some one or more jointsto be subjected to the vibration reduction process in an aspect in whichdesignation of some one or more joints not subjected to the vibrationreduction process among the plurality of joints is received. The filterprocessing unit 340 executes the vibration reduction process on some oneor more joints to be subjected to the vibration reduction process anddoes not execute the vibration reduction process on the other joints.

In such an aspect, the vibration reduction process can be executed onthe axes (for example, the axes close to the proximal portion supportingthe robot, such as X11 and X12 of FIG. 1) in which an influence ofvibration on the entire robot is high to reduce the vibration in theentire robot. Conversely, the vibration reduction process is notexecuted on the axis (for example, the axis near the distal end of thearm, such as X15 of FIG. 1) in which the influence of vibration on theentire robot is low, and thus precision of a work by the end effector,such as an operation of grasping the work piece can be improved.

(8) The present disclosure is not limited to the measurement of thevibration frequency of the vibration desired to be reduced in the robotand can be applied when a vibration frequency of vibration desired to bereduced is measured in any of various machines of which a physical stateis changed through automatic control.

D2. Modification Example 2

(1) In the foregoing embodiment, when the first condition includingnon-input of the instruction indicating execution of the reduction inthe frequency component is satisfied, the first control signal in whichthe frequency component is not reduced is output by the filterprocessing unit 340. The first condition can further include anothercondition such as a condition that predetermined setting is executed ora condition that the predetermined setting is not executed as aninferior weighted condition.

As the inferior weighted condition, for example, (a) a condition that aninstruction not indicating the reduction in the frequency component isinput can be exemplified. As the inferior weighted condition, (b) acondition that a password determined in advance is input (c) a conditionthat an ID determined in advance and a password corresponding to the IDare input, and (d) a condition that the instruction of (a) is input viahardware (see reference numeral 600 of FIG. 1) as a setting devicedetermined in advance can further be exemplified in addition to (a).These inferior conditions may also be combined.

The instruction indicating non-execution of the reduction in thefrequency component may be an explicit instruction or an implicitinstruction. As the implicit instruction, for example, there is aninstruction which is not recognized as being compatible with aninstruction selectively executed as “an instruction indicating executionof the reduction in the frequency component”, that is, “an instructionindicating execution of the reduction in the frequency component”. Asthe instruction, for example, “an instruction to operate in a mode inwhich the accurate position control is executed” can be exemplified.

When the constituent element (the functional unit such as a CPU)determining whether it is satisfied that “the instruction indicating thereduction in the frequency component is not input” may determine that itis satisfied that “the instruction indicating execution of the reductionin the frequency component is not input” when a time of a lengthdetermined in advance and the explicit or implicit instructionindicating execution of the reduction in the frequency component is notinput. On the other hand, the temporal restriction may not be provided.That is, when the explicit or implicit instruction indicating executionof the reduction in the frequency component is input, it may be firstdetermined that it is not satisfied that “the instruction indicatingexecution of the reduction in the frequency component is not input”. Inother cases, it may be determined that it is satisfied that “theinstruction indicating execution of the reduction in the frequencycomponent is not input”.

(2) In the foregoing embodiment, when the second condition includinginput of the instruction indicating execution of the reduction in thefrequency component is satisfied, the second control signal is output bythe filter processing unit 340. The second condition can further includeanother condition such as a condition that predetermined setting isexecuted or the predetermined setting is not executed as an inferiorweighted condition.

As the inferior weighted condition, for example, (b) a condition that apassword determined in advance is input (c) a condition that an IDdetermined in advance and a password corresponding to the ID are input,and (d) a condition that the instruction indicating execution of thereduction in the frequency component is input via hardware (seereference numeral 600 of FIG. 1) as a setting device determined inadvance can be exemplified. These inferior conditions may also becombined.

The instruction indicating execution of the reduction in the frequencycomponent may be an explicit instruction or an implicit instruction. Asthe implicit instruction, for example, there is an instruction which isnot recognized as being compatible with an instruction selectivelyexecuted as “an instruction indicating non-execution of the reduction inthe frequency component”, that is, “an instruction indicatingnon-execution of the reduction in the frequency component. As theinstruction, for example, “an instruction to operate in a mode in whichhigh-speed running is executed” or “an instruction to operate in a modein which quiet running is executed can be exemplified.”

(3) In the foregoing embodiment, when the vibration reduction process isexecuted, the indication Dvr illustrated in FIG. 13 is displayed on thedisplay 602. However, when the second control signal in which thepredetermined frequency component is reduced is output from the controlsignal switching unit, the indication displayed on the display unit maybe realized in another aspect. For example, a lamp can also be includedas a display unit and the lamp can blink when the second control signalin which the predetermined frequency component is reduced is output. Noindication can be displayed even when the second control signal in whichthe predetermined frequency component is reduced is output.

(4) In the foregoing embodiment, the filter processing unit 340 outputsthe first control signal in which the frequency component is not reducedwhen the third condition including satisfaction of both the input of theinstruction indicating execution of the reduction in the frequencycomponent and satisfaction of the inferior condition determined inadvance, as illustrated in FIG. 11 is satisfied (see FIGS. 11 and 12).However, the third condition can further include another condition suchas a condition that predetermined setting is executed and thepredetermined setting is not executed as an inferior weighted condition.

In the foregoing embodiment, when the continuous path control (CPcontrol) is executed, the vibration reduction process is not executed(see the left column and the seventh row of FIG. 11). However, even whenthe continuous path control is executed, the vibration reduction processmay be executed.

(5) In the foregoing embodiment, the force sensor 190 can measure theforces Fx, Fy, and Fz in the three axes directions of the X, Y, and Zaxes and the torques Tx, Ty, and Tz around the X, Y, and Z axes acted onthe end effector 200. However, the force detection unit may detect onlyforce of one axis or may detect only torque of one axis. The forcedetection unit may be able to detect forces or torques of two axes. Theforce detection unit may be able to detect any combination of forces ofthree or less axes and torques of three or less axes.

(6) The present disclosure is not limited to the control of the robotand can be applied to any of various machines that execute automaticcontrol.

D3. Modification Example 3

(1) In the present specification, the description of “the measurementunit installed in the robot” include a measurement unit embedded as apart of the configuration of the robot in advance and a measurement unitinstalled in the robot at the time of measurement.

(2) In the foregoing embodiment, the setting device 600 and the robotcontrol device 300 can also receive an instruction indicating executionof one specific operation and can also receive an instruction indicatingcontinuous execution of a plurality of specific operations. Then, thesetting device 600 and the robot control device 300 can receive theinstruction indicating execution of one specific operation at adifferent timing. Then, the specific operations instructed at thedifferent timings may be the same specific operation or may be differenttypes of specific operations. That is, the reception unit 611 serving asa reception unit can receive the instruction indicating a plurality ofkinds of specific operations, and may receive the instructioncontinuously or may receive the instruction at an individual timing oneby one. Further, the reception unit (see the reception unit 611 of FIG.15) and the execution unit (see the position control unit 320, the speedcontrol unit 330, the filter processing unit 340, the torque controlunit 350, and the servo amplifier 360 of FIG. 2) may be configured toreceive and execute only one specific operation.

(3) The plurality of operations which are the specific operations aplurality of operations in an attitude of the robot at the time ofending the operation is the same and operations (for example, a path ora speed of the operation) until the robot takes the attitude at the timeof ending the operation are different.

(4) The specific operation may be specified in accordance with a methodof designating a position or a motion of the distal end of the armwithout designating the joint.

(5) The present disclosure is not limited to the measurement of thevibration frequency of the vibration desired to be reduced in the robotand can also be applied to a case in which a frequency of vibrationdesired to be reduced is measured in any of various machines of which aphysical state is changed through automatic control.

D4. Modification Example 4

(1) In the foregoing embodiment, the frequency graph Gf, the maximumfrequency indication UI25 and UI29, the spectrum indication UI94 fx toUI94 fz and UI94 tx to UI94 tz, and the like are displayed as“information regarding a target vibration frequency” on the display 602.In this way, the “information regarding the target vibration frequency”may be a target vibration frequency or may be any parameter with whichthe target vibration frequency can be uniquely specified. The“information regarding a target vibration frequency” may be a graphshowing vibration including the target vibration frequency.

The “vibration” may be vibration of force or torque added to the jointof the robot which is a control target, may be vibration of accelerationof a constituent portion of a measurement target, may be vibration of aspeed, or may be vibration of a position.

(2) In the foregoing embodiment, the spectrum is displayed based onmeasured values of the force sensors 190 and 190 b. However, thespectrum may be displayed based on a measured value of acceleration oran angular velocity. Based on the measured value of the force sensor, afrequency with the maximum power is automatically shown as a numericalvalue in the frequency graph Gf. That is, the user interfaces U01 to U04can be displayed based on a measured value of acceleration or an angularvelocity or can also be displayed based on a measured value of force ortorque.

(3) In the foregoing embodiment, the robot instruction device 600 alsofunctions as a setting device. However, a device that sets the vibrationreduction function may be a dedicated device. A device that sets thevibration reduction function may be realized by installing applicationsoftware to execute setting of the vibration reduction function in ageneral personal computer or a smartphone.

(4) In the foregoing embodiment, the user interface U01 is a userinterface for designating a data file and executing a process of settingthe vibration reduction function. However, the setting of the vibrationreduction function may be executed by operating the robot to generatedata from the operation without taking data measured in advance andgenerated and executing the process.

In a part of the foregoing embodiment, the information regarding thetarget vibration frequency of the control target is displayed on thedisplay unit by giving an instruction to execute the program in stepS230 of FIG. 22 as the first instruction (see step S250 of FIG. 22).However, the first instruction serving as an opportunity to display theinformation regarding the target vibration frequency of the controltarget may be an instruction to process the measurement result of thevibration or may be an instruction to display the information regardingthe target vibration frequency of the control target (see step S250 ofFIG. 22). At this time, the process for the measurement result of thevibration may be executed based on the data of the specific operation(see step S230 of FIG. 22) executed immediately before or may beexecuted based on data generated based on a specific operation executedpreviously (see UI11 of FIG. 27). That is, the first instruction may bean instruction given by the user assuming that the information regardingthe target vibration frequency of the control target is displayed on thedisplay unit.

(5) In the foregoing embodiment, the measurement result of the residualvibration by the specific operation before the specific frequencycomponent is eliminated is displayed in step S250 of FIG. 38.Thereafter, the measurement result of the residual vibration by thespecific operation in which the specific frequency component iseliminated is displayed in steps S350 and S450. However, the indicationbased on the vibration data of the operation with the second controlsignal from which the specific frequency component is reduced can berealized without realizing the indication based on the vibration data ofthe operation with the first control signal from which the specificfrequency component is not reduced.

(6) In the foregoing embodiment, the start time instruction UI51 of thetime section which is the processing target set as the timing at whichthe position control signal instructing the end of the specificoperation is output from the control signal generation unit 310 asdefault. That is, the data in which the measurement result of thevibration is recorded includes data of vibration of the control target(data in which is not considered at the time of determining the targetvibration frequency) at an earlier time than “a time section of thevibration data with which the target vibration frequency of the controltarget is determined based on the data”. However, instead of thisaspect, the measurement can also be started from a start timing of “thetime section of the vibration data with which the target vibrationfrequency of the control target is determined based on the data”. Acertain time section which is the time section indicating the vibrationof the control target may be set automatically or may be set by theuser.

(7) In the foregoing embodiment, the time section of the data which isthe origin for determining the target vibration frequency of the controltarget is a time section in which the control signal for driving thecontrol target is not output. However, the time section in whichinformation which is the origin for determining the target vibrationfrequency of the control target is prepared can also include a timesection in which a control signal for uniformly moving the controltarget is output.

In such an aspect, a parameter indicating the target vibration frequencycalculated based on vibration data of the time section in which theuniform movement is executed can be displayed. Therefore, the user canunderstand the target vibration frequency at which there is a highpossibility of the control target being vibrated most in the state inwhich the uniform movement has to be executed without vibration. The“uniform movement” includes uniform linear movement and uniformrotational movement. In the present specification, “uniform velocity”means that a change in velocity is within 5%.

(8) In the foregoing embodiment, the start time instruction UI51 of aprocessing target time section is a timing at which the position controlsignal instructing the end of the specific operation is output from thecontrol signal generation unit 310 as default. However, the userdesignates the start time without receiving suggestion of the start timefrom a device.

When an instruction indicating the execution of the setting of thevibration reduction function is input, a parameter indicating one targetvibration frequency determined based on the vibration data can also bedisplayed on the display unit by the display control unit withoutreceiving an instruction to designate a part of the vibration data or aninstruction to acquire a part of the designated vibration data.

For example, when the vibration is measured by executing only onespecific operation, the indication (see Gid of FIGS. 45 and 46)corresponding to a step of a recent command is not displayed.

(9) The present disclosure is not limited to the measurement of thevibration frequency of the vibration desired to be reduced in the robotand can be applied to a case in which the vibration frequency of thevibration desired to be reduced is measured in any of various machinesof which a physical state is changed through automatic control.

D5. Modification Example 5

(1) In the foregoing embodiment, the vibration measurement device 700 isinstalled in the post F400 b in which the camera 400 b is installed tomeasure vibration of the camera 400 b (see P704 of FIG. 10 and FIG. 36).However, when the vibration of an imaging unit is measured, the firstdetector may be installed in the imaging unit capable of capturing animage (see P705 of FIG. 10).

The imaging unit may be a camera that captures a still image or may be acamera that captures a moving image. That is, an image captured by thecamera may be a still image or may be a moving image.

(2) In the foregoing embodiment, the vibration measurement device 700 isinstalled in both the control target robot and a structure other thanthe control target robot. Then, the vibration reduction process isexecuted based on measurement results of both the robot and thestructure. However, the filter processing unit 340 serving as a controlsignal alternation unit may not reduce the frequency component based onthe second detector installed in the control target robot.

(3) In the foregoing embodiment, the vibration measurement device 700 ismounted on the arm 110 b of the robot (see P702 of FIG. 10). However,the second detector can be installed on a proximal portion of the arm ofthe robot which is not displaced by driving of the servo motor.

(4) In the foregoing embodiment, the vibration measurement device 700includes the first mounting unit 760 to the fourth mounting unit 790which can each be mounted on or detached from the second support unit720 and can be exchanged (see FIGS. 18 to 21). However, the detector maynot include the exchangeable mounting units and the output unit can beinstalled in a measurement target portion.

The detector does not include the notation (see reference numeral 745 ofFIG. 16) indicating three directions which are directions of vibrationmeasured on the outer surface.

In the foregoing embodiment, the output terminal included in the outputunit 750 of the vibration measurement device 700 is wire-connected tothe setting device 600. However, the vibration measurement device can bewirelessly connected to the setting device.

(5) In the foregoing embodiment, the reduction of the vibration of the6-axis or 4-axis robot has been described. However, the technologydisclosed in the present specification is not limited to the 6-axis or4-axis multiaxial robot and can be applied to any of various machines ofwhich a physical state is changed through control, such as a printer anda projector. For example, by applying the technology disclosed in thepresent specification to an operation of a printing head or a transportoperation of a printing medium, it is also possible to reduce a change(vibration) in a relative position of the head to the printing medium.

(6) The present disclosure is not limited to the robot and an imagesensor used to control the robot and can be applied to any of variousmachines of which a physical state is changed through automatic controland a structure other than the machines having an influence on theautomatic control.

The present disclosure is not limited to the above-describedembodiments, examples, and modification examples and can be realizedwith various configurations within the scope of the present disclosurewithout departing from the gist of the present disclosure. For example,technical features in embodiments, examples, and modification examplescorresponding to the technical features in the aspects described inSUMMARY can be appropriately exchanged or combined to resolve some orall of the above-described problems or achieve some or all of theabove-described advantages. The technical features can be appropriatelyomitted unless the technical features are essential in the presentspecification.

The entire disclosure of Japanese Patent Application No. 2017-069899,filed Mar. 31, 2017 is expressly incorporated by reference herein.

What is claimed is:
 1. A control device comprising: a processor that isconfigured to execute computer-executable instructions so as to controla robot, wherein the processor is configured to: generate a secondcontrol signal by reducing at least one of frequency components obtainedbased on an output of a first detector which is installed in a portionvibrated by a robot and detects vibration from a first control signalfor driving the robot, and wherein the portion is external to the robot,a robot housing, and an end effector installed on the robot, and thefirst detector includes a first support on which at least one sensor andthe output is mounted, and a second support mounting the first detectorto the portion, the second support being configured to mount the firstdetector using a plurality of different mounts, and the first supportand the second support being connected by connectors.
 2. The controldevice according to claim 1, wherein the portion is a frame supportingthe robot.
 3. The control device according to claim 1, wherein theportion is at least one of a camera capable of capturing an image and astructure in which the camera is installed.
 4. The control deviceaccording to claim 1, wherein the portion is one or more locations amonga location at which a work piece which is a work target of the robot isput by the robot, a location at which the work piece is put before thework piece is moved by the robot, and a location at which the robotexecutes a work on the work piece.
 5. The control device according toclaim 1, wherein the processor is configured to: output the secondcontrol signal obtained by reducing at least one of frequency componentsdetermined based on an output of a second detector which is installed inthe robot and detects vibration from the first control signal.
 6. Thecontrol device according to claim 1, wherein the processor is configuredto: generate a third control signal by reducing at least one offrequency components determined based on an output of a second detectorwhich is installed in the robot and detects vibration from the firstcontrol signal and is able to switch and output the second and thirdcontrol signals.
 7. The control device according to claim 2, wherein theprocessor is configured to: generate a third control signal by reducingat least one of frequency components determined based on an output of asecond detector which is installed in the robot and detects vibrationfrom the first control signal and is able to switch and output thesecond and third control signals.
 8. The control device according toclaim 3, wherein the processor is configured to: generate a thirdcontrol signal by reducing at least one of frequency componentsdetermined based on an output of a second detector which is installed inthe robot and detects vibration from the first control signal and isable to switch and output the second and third control signals.
 9. Thecontrol device according to claim 4, wherein the processor is configuredto: generate a third control signal by reducing at least one offrequency components determined based on an output of a second detectorwhich is installed in the robot and detects vibration from the firstcontrol signal and is able to switch and output the second and thirdcontrol signals.
 10. The control device according to claim 5, whereinthe second detector is installed in an arm included in the robot.
 11. Arobot system comprising: a robot; and a control device that comprises aprocessor that is configured to execute computer-executable instructionsso as to control the robot; wherein the processor is configured to:generate a second control signal by reducing at least one of frequencycomponents obtained based on an output of a first detector which isinstalled in a portion vibrated by a robot and detects vibration from afirst control signal for driving the robot, and wherein the portion isexternal to the robot, a robot housing, and an end effector installed onthe robot, and the first detector includes a first support on which atleast one sensor and the output is mounted, and a second supportmounting the first detector to the portion, the second support beingconfigured to mount the first detector using a plurality of differentmounts, and the first support and the second support being connected byconnectors.
 12. The robot system according to claim 11, wherein theportion is a frame supporting the robot.
 13. The robot system accordingto claim 11, wherein the portion is at least one of a camera capable ofcapturing an image and a structure in which the camera is installed. 14.The robot system according to claim 11, wherein the portion is one ormore locations among a location at which a work piece which is a worktarget of the robot is put by the robot, a location at which the workpiece is put before the work piece is moved by the robot, and a locationat which the robot executes a work on the work piece.
 15. The robotsystem according to claim 11, wherein the processor is configured to:output the second control signal obtained by reducing at least one offrequency components determined based on an output of a second detectorwhich is installed in the robot and detects vibration from the firstcontrol signal.
 16. The robot system according to claim 11, wherein theprocessor is configured to: generate a third control signal by reducingat least one of frequency components determined based on an output of asecond detector which is installed in the robot and detects vibrationfrom the first control signal and is able to switch and output thesecond and third control signals.
 17. The robot system according toclaim 12, wherein the processor is configured to: generate a thirdcontrol signal by reducing at least one of frequency componentsdetermined based on an output of a second detector which is installed inthe robot and detects vibration from the first control signal and isable to switch and output the second and third control signals.
 18. Therobot system according to claim 13, wherein the processor is configuredto: generate a third control signal by reducing at least one offrequency components determined based on an output of a second detectorwhich is installed in the robot and detects vibration from the firstcontrol signal and is able to switch and output the second and thirdcontrol signals.
 19. The robot system according to claim 14, wherein theprocessor is configured to: generate a third control signal by reducingat least one of frequency components determined based on an output of asecond detector which is installed in the robot and detects vibrationfrom the first control signal and is able to switch and output thesecond and third control signals.
 20. The robot system according toclaim 15, wherein the second detector is installed in an arm included inthe robot.